MgO-Ti(ON) Interlayer for DC-Sputtered Magnetic Recording
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Solution Overview
Problem
Conventional ceramic MgO interlayers cannot be DC-sputtered, and previous MgO-TiO interlayers fail to achieve sufficient magnetics when deposited with DC-sputtering techniques, resulting in high particle generation and insufficient performance in commercial mass production environments.
Innovation Solution
A MgO-Ti(ON) layer is introduced between the substrate and the magnetic recording layer, deposited using a composite sputtering target in a nitrogen environment, providing a suitable lattice structure for epitaxial growth, thermal conductivity, and low defect levels, while enabling DC-sputtering with high deposition speed.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of energy
If conventional ceramic MgO interlayers are used, then thermal conductivity is improved, but DC-sputtering capability is lost and particle generation increases
Solution Approach 1:
The patent employs a composite MgO-TiO interlayer material that combines the thermal conductivity benefits of MgO with the DC-sputterability of TiO. This composite approach allows the interlayer to maintain low particle generation and high thermal conductivity while being compatible with DC-sputtering deposition processes used in commercial mass production.
2Ease of manufacture
If MgO-TiO interlayers are deposited with DC-sputtering, then manufacturing ease is improved, but magnetic performance becomes insufficient
Solution Approach 1:
The patent optimizes the composition parameters of the MgO-TiO composite target, specifically controlling the ratio of MgO to TiO components. By adjusting these compositional parameters, the interlayer achieves both good DC-sputtering characteristics and sufficient magnetic performance, resolving the contradiction between ease of manufacture and reliability.
3Productivity
If DC-sputtering is used for interlayer deposition, then productivity is improved, but particle generation increases
Solution Approach 1:
The patent uses a composite target material that is optimized for DC-sputtering processes, accepting that the target itself will be consumed during deposition. The composite MgO-TiO formulation allows high deposition rates via DC-sputtering while minimizing particle generation, making the process economically viable for mass production.
4Manufacturing precision
If conventional interlayers are used, then lattice structure for epitaxial growth is provided, but thermal management efficiency decreases
Solution Approach 1:
The MgO-TiO composite interlayer performs multiple functions simultaneously: it provides the necessary lattice structure for epitaxial growth of the magnetic recording layer while also serving as an efficient thermal management layer. This multi-functionality resolves the contradiction between achieving precise crystal orientation and maintaining thermal conductivity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The MgO-Ti(ON) layer promotes oriented growth of the magnetic recording layer, reduces defects, and achieves improved thermal conductivity and signal-to-noise ratio, allowing for efficient heat management and reduced laser power requirements in heat-assisted magnetic recording media.
Implementation Method 1
depositing MgO and TiO using a composite sputtering target in a nitrogen environment to form a MgO—Ti(ON) layer
Implementation Method 2
An FePt magnetic layer is then epitaxially grown on the MgO—Ti(ON) layer
Data Source
AI summary
A stack includes a substrate and a magnetic recording layer. Disposed between the substrate and magnetic recording layer is an MgO—Ti(ON) layer.