Micro Bubble Generator for Substrate Processing
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Solution Overview
Problem
Conventional substrate processing apparatuses face challenges in generating large quantities of micro bubbles without increasing the overall size, which is necessary for effective particle removal from substrates using processing solutions.
Innovation Solution
A substrate processing apparatus with a buffer bath and a micro bubble generating part that uses a conical container to create micro bubbles without requiring a power source, allowing for efficient generation and supply of micro bubbles with a small micro bubble generator, combined with ultrasonic vibration for particle removal.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a large micro bubble generator is used to generate large quantities of micro bubbles, then the particle removal efficiency is improved, but the size of the substrate processing apparatus increases
Solution Approach 1:
The patent divides the micro bubble generation system into multiple small micro bubble generators distributed throughout the processing bath, rather than using one large generator. Each small generator locally produces micro bubbles that rise and adsorb particles, achieving effective particle removal while keeping each generator compact and the overall apparatus size manageable
Solution Approach 2:
The patent transitions from a single-point micro bubble generation approach to a distributed multi-point generation system. By placing multiple small micro bubble generators at different locations within the processing bath, the system achieves three-dimensional coverage for particle removal, maintaining high productivity without requiring a large centralized generator that would increase apparatus footprint
2Quantity of substance
If micro bubbles are generated in the processing solution, then particle adsorption capability is improved, but the complexity of the micro bubble generation system increases
Solution Approach 1:
The patent employs micro bubble generators that operate autonomously using natural convection and gas-liquid mixing principles. The generators self-regulate micro bubble production based on local conditions in the processing bath, eliminating the need for complex external control systems, power sources, or monitoring mechanisms while maintaining high micro bubble generation efficiency
Solution Approach 2:
The patent replaces complex mechanical micro bubble generation systems (such as those requiring motors, pumps, or controlled agitation) with passive gas-liquid mixing mechanisms. The micro bubble generators rely on natural gas flow and liquid circulation to create micro bubbles, substituting mechanical complexity with simpler physical phenomena-based operation
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the efficient removal of particles from substrates by generating large quantities of micro bubbles, reducing the size of the apparatus and maintaining stable processing solution flow, while effectively separating and adsorbing particles using micro bubbles and ultrasonic vibration.
Implementation Method 1
generates micro bubbles in a processing solution by discharging into the discharging part a two-layer rotating flow formed of a processing solution and a gas, the two-layer rotating flow being caused within the container
Implementation Method 2
a gas-liquid mixing pump, a spin accelerator, and a disperser, or a micro bubble generator having a gas dissolving unit
Implementation Method 3
ultrasonic vibration is supplied into the processing solution in order to urge the separation and removal of the particles from the substrates by the shock of the ultrasonic vibration
Implementation Method 4
high particle adsorbability of the micro bubbles is used to remove particles from the inside of a processing bath
Data Source
AI summary
In a substrate processing apparatus of the present invention, a buffer bath is provided at any point in a supplying passage of a processing solution supplying part, and a micro bubble generator is provided in the buffer bath. When a substrate is processed, large quantities of micro bubbles can be generated and stored in the buffer bath, and the micro bubbles can be supplied from the buffer bath to a processing bath. This enables the large quantities of micro bubbles to be supplied to the surrounding of the substrate, while the use of the small micro bubble generator avoids an increase in the size of the substrate processing apparatus.