Micro Bubble Ozone Removal Unit for Semiconductor Substrate Cleaning
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Solution Overview
Problem
Current methods for removing dissolved ozone from liquids in semiconductor manufacturing processes, such as using catalysts or thermal decomposition, require frequent catalyst replacement and high energy consumption, making them inefficient and costly.
Innovation Solution
A method and apparatus that utilize micro bubbles, generated by rotating liquid containing gases, to remove dissolved ozone from liquids by supplying them into the liquid and using the energy or radical ions produced during bubble dissolution to decompose ozone, with the bubbles being oxygen or inert gases like nitrogen, argon, or helium, and having an average size of 50 micrometers or less.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If catalysts are used to remove dissolved ozone, then ozone removal is achieved, but catalysts have to be periodically replaced due to limited life spans
Solution Approach 1:
The patent extracts the harmful ozone molecules from the liquid phase by introducing microbubbles that provide nucleation sites for ozone decomposition. The ozone is transferred from the bulk liquid to the bubble interface where it decomposes harmlessly, eliminating the need for catalysts that require replacement.
Solution Approach 2:
Microbubbles act as an intermediary medium between the dissolved ozone and the environment. The bubbles provide a large surface area interface where ozone can decompose through contact with the gas-liquid boundary, serving as a mediator that facilitates ozone removal without requiring catalyst materials.
2Reliability
If thermal decomposition method is used to remove dissolved ozone, then ozone is converted to oxygen, but much heat and electric power are consumed
Solution Approach 1:
The patent utilizes phase transition by introducing gas bubbles into the liquid. The microbubbles provide a gas-liquid interface where ozone decomposes from dissolved state to gaseous state, leveraging the phase boundary for decomposition without requiring thermal energy input.
Solution Approach 2:
The invention employs pneumatic principles by introducing microbubbles (gas phase) into the liquid phase containing dissolved ozone. The bubbles rise through the liquid, creating extensive gas-liquid contact area that facilitates ozone transfer and decomposition without thermal processing.
3Speed
If ultraviolet rays are used to expedite ozone decomposition, then decomposition is accelerated, but much energy of ultraviolet rays is consumed
Solution Approach 1:
The patent replaces the electromagnetic field approach (ultraviolet radiation) with a mechanical approach (microbubble injection). Instead of using high-energy UV photons to break down ozone molecules, the system uses mechanical bubble generation to provide physical interfaces for ozone decomposition, consuming far less energy.
Solution Approach 2:
The invention changes the parameter of decomposition mechanism from photochemical (UV-induced) to physical-chemical (bubble-interface-driven). By altering the decomposition pathway from UV-photon activation to bubble-contact decomposition, the system achieves effective ozone removal with significantly lower energy input.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach effectively reduces the need for catalyst replacement and energy consumption, providing a more efficient and cost-effective method for ozone removal by leveraging the energy from micro bubble dissolution to decompose ozone in liquids.
Implementation Method 1
allowing dissolved ozone to exit from the liquid by energy or radical ions that are generated while the micro bubbles are dissolved in the liquid
Implementation Method 2
allowing dissolved ozone to exit from the liquid by energy or radical ions that are generated while the micro bubbles are dissolved in the liquid
Implementation Method 3
the micro bubbles may be generated by rotating liquid containing gases and then be supplied to the liquid containing the dissolved ozone
Data Source
AI summary
Disclosed are a dissolved ozone removal unit that removes dissolved ozone from liquid, an apparatus for treating a substrate, a method of removing dissolved ozone, and a method of cleaning a substrate. The method of removing dissolved ozone in liquid includes supplying micro bubbles to the liquid, and allowing dissolved ozone to exit from the liquid by energy or radical ions that are generated while the micro bubbles are dissolved in the liquid.