Micro-channel Plate Integrally Formed Films Suppress Ion Feedback
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Solution Overview
Problem
Conventional micro-channel plates face performance degradation due to residual organic films interfering with ion barrier films, leading to insufficient improvement in life characteristics and mechanical strength issues when trying to suppress ion feedback.
Innovation Solution
Integrally forming electron emission and ion barrier films using the same film formation step, preferably with metal oxides by atomic layer deposition, to ensure thinner ion barrier films and prevent organic film residue, along with additional metal films for electrical stability and resistive films for electron multiplication.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the ion barrier film is made thinner to improve secondary electron permeability, then electron emission performance is improved, but mechanical strength of the film deteriorates
Solution Approach 1:
The patent merges the formation of the ion barrier film and electron emission film into a single film formation step, creating an integrated dual-functional film structure. This allows the ion barrier function and electron emission function to be achieved simultaneously in one layer, optimizing both protective and emissive properties without compromising mechanical strength.
Solution Approach 2:
The patent employs composite material composition for the ion barrier film, combining multiple materials with complementary properties. This composite structure provides both the necessary thinness for electron permeability and the mechanical strength required for structural integrity, resolving the contradiction between film thickness and strength.
2Manufacturing precision
If multiple separate film formation steps are used to form ion barrier film and electron emission film, then film quality is improved, but manufacturing complexity and time increase
Solution Approach 1:
The patent combines multiple film formation operations into a single integrated film formation step. This merging approach maintains film quality by ensuring proper layer formation while significantly reducing manufacturing process complexity and production time, as both the ion barrier film and electron emission film are formed simultaneously in one step.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach effectively suppresses ion feedback, enhancing the life characteristics of micro-channel plates and image intensifiers by maintaining film integrity and preventing organic film residue, while ensuring mechanical strength and improved electron multiplication.
Implementation Method 1
the electron emission film and the ion barrier film are deposited by an atomic layer deposition method
Data Source
AI summary
In a micro-channel plate, an electron emission film and an ion barrier film formed on a substrate are integrally formed by the same film formation step. In this structure, the electron emission film and the ion barrier film are made as continuous and firm films and the ion barrier film can be made thinner. Since the ion barrier film is formed on the back side of an organic film, the organic film is exposed during removal of the organic film. This prevents the organic film from remaining and thus suppresses degradation of performance of the ion barrier film due to the residual organic film, so as to suppress ion feedback from the micro-channel plate and achieve a sufficient improvement in life characteristics of an image intensifier.