Micro-disc Modulator With Arc Grooves For CMOS Integration

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Solution Overview

Problem

Existing optical modulators for silicon photonic devices face challenges in achieving high-speed, low-power, and compact designs with high modulation efficiency while maintaining single resonance mode and compatibility with CMOS technology, and they require significant power and footprint for thermal tuning.

Innovation Solution

A novel micro-disc modulator design with a vertical p-n junction and arc-shaped grooves on the top surface to suppress secondary resonance modes, allowing for low operating voltage, reduced power consumption, and seamless integration with CMOS technology, along with an optoelectronic communication apparatus using heaters for thermal tuning to optimize modulator performance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If existing optical modulators are designed for high-speed operation, then modulation speed is improved, but power consumption increases

Engineering Contradiction:
Improvemodulation speedVSAvoidpower consumption
Core Design Contradiction:
SpeedVSUse of energy by moving object

Solution Approach 1:

The patent changes the operating parameters by using a micro-disc resonator design with specific quality factor (Q>100) and resonance wavelength, enabling high-speed modulation at low power consumption through resonant enhancement of the electro-optic effect

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs dynamic thermal tuning through integrated heaters to adjust the resonance frequency of the micro-disc modulator, allowing the device to adapt to different operating conditions and maintain optimal performance across temperature variations

Inventive Principle:
Principle #15Dynamics

2Ease of operation

If thermal tuning is used to optimize modulator performance, then resonance frequency control is improved, but device footprint increases

Engineering Contradiction:
Improveresonance frequency controlVSAvoiddevice footprint
Core Design Contradiction:
Ease of operationVSArea of stationary object

Solution Approach 1:

The patent integrates thermal tuning heaters directly within the micro-disc structure itself, nesting the tuning mechanism inside the resonator to achieve frequency control without adding external components or increasing overall device footprint

Inventive Principle:
Principle #7Nested doll (Nesting)

Solution Approach 2:

The patent uses vertical stacking of multiple micro-disc modulators with different resonance frequencies in the same footprint area, utilizing the vertical dimension to provide thermal tuning capability without expanding the horizontal device area

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Speed

If multiple resonance modes are present, then bandwidth is improved, but modulation efficiency decreases

Engineering Contradiction:
ImprovebandwidthVSAvoidmodulation efficiency
Core Design Contradiction:
SpeedVSLoss of energy

Solution Approach 1:

The patent introduces arc-shaped grooves at specific locations on the micro-disc surface to locally modify the resonance characteristics, suppressing unwanted higher-order modes while preserving the fundamental mode for efficient modulation

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design achieves high modulation efficiency, low power consumption, and compact size with stable, high-speed operation, enabling efficient thermal tuning and reduced footprint, while maintaining single resonance mode and compatibility with CMOS technology.

Implementation Method 1

An optical modulator is an optical device in which an electrical signal-controlled element is used to modulate light in an isolated medium, such as waveguide, using electro-optic effects

Methodology Applied
Scientific EffectElectro-optic effects: Electro-Optic Effects

Implementation Method 2

The property of an example micro-disc modulator in accordance with the present disclosure allows tuning of resonance frequency with temperature

Methodology Applied
Scientific EffectThermal energy: Heating

Data Source

PatentUS11444696B2Micro-disc modulator, silicon photonic device and optoelectronic communication apparatus using the same
Publication Date: 2022.09.13 PHOTONIC INT
  • US11444696B2 patent drawing
  • US11444696B2 patent drawing
  • US11444696B2 patent drawing

AI summary

Various embodiments of a micro-disc modulator as well as a silicon photonic device and an optoelectronic communication apparatus using the micro-disc modulator are described. In one aspect, a device includes a SOI substrate and a silicon photonic structure formed on a primary surface of the SOI substrate. The semiconductor substrate includes a silicon waveguide and a micro-disc modulator. The micro-disc modulator is adjacent to the silicon waveguide and has a top surface substantially parallel to the primary surface of the SOI substrate. The top surface of the micro-disc modulator includes one or more discontinuities therein. The micro-disc modulator may be a multi junction micro-disc modulator having two vertical p-n junctions with a single resonance frequency to achieve high-speed modulation and low-power consumption.