Micro Electrostatic Pneumatic Motor with Annular Pushrod

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Solution Overview

Problem

Existing miniature motor technologies face challenges in achieving high speed and low torque or low speed and high torque operations efficiently, particularly in industrial, medical, and biological applications, where precise mechanical energy conversion is required.

Innovation Solution

The development of a micro electrostatic actuated pneumatic driven motor that utilizes a body with displacement cavities, bleeder ports, and an annular pushrod mechanism, where electrical signals cause membrane flexure to displace air, translating into linear reciprocating motion to rotate a gear, allowing for adjustable speed and torque through gearing arrangements.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Force

If conventional electric motors are used for miniature applications, then magnetic field interaction can provide torque, but the motor size and complexity increase

Engineering Contradiction:
ImprovetorqueVSAvoidmotor size
Core Design Contradiction:
ForceVSVolume of moving object

Solution Approach 1:

The patent replaces the conventional electromagnetic motor system with a pneumatic system driven by electrostatically actuated membranes. Electrical energy is converted to mechanical energy through electrostatic actuation of flexible membranes that displace air, which then drives a pushrod and gear mechanism. This substitution eliminates the need for magnetic fields, stators, and rotors, enabling miniature motor construction.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The invention uses pneumatic principles where compressed air or atmospheric air is displaced by electrostatically actuated membranes to create linear motion in a pushrod. This pneumatic intermediary converts electrical actuation into mechanical motion, allowing for compact motor design while maintaining torque output through gear multiplication.

Inventive Principle:
Principle #29Pneumatics and hydraulics

2Speed

If high speed operation is achieved in miniature motors, then productivity increases, but torque decreases

Engineering Contradiction:
Improvemotor speedVSAvoidtorque
Core Design Contradiction:
SpeedVSForce

Solution Approach 1:

The patent employs a dynamic gear mechanism that can operate at high speeds while maintaining torque through the pneumatic drive system. The electrostatic membrane actuation provides rapid response capability for high-speed operation, and the gear train transmits this motion while preserving torque through mechanical advantage, allowing dynamic adjustment between speed and torque requirements.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The electrostatic membrane actuation operates through periodic cycles of charging and discharging, creating reciprocating motion that drives the pushrod and gear. This periodic action enables high-frequency operation for increased speed while the gear mechanism ensures torque is maintained through each cycle, converting the periodic electrical input into continuous rotational output.

Inventive Principle:
Principle #19Periodic action

3Force

If low speed high torque operation is required, then force increases, but productivity decreases

Engineering Contradiction:
ImprovetorqueVSAvoidoutput per unit time
Core Design Contradiction:
ForceVSProductivity

Solution Approach 1:

The patent introduces air as an intermediary medium between the electrostatic actuation and the mechanical output. The electrostatic membranes displace air, which then acts as a compliant intermediary to drive the pushrod and gear mechanism. This pneumatic intermediary allows for smooth torque transmission at low speeds while maintaining productivity through the efficiency of gas compression and expansion cycles.

Inventive Principle:
Principle #24Intermediary (Mediator)

4Measurement precision

If precise mechanical energy conversion is achieved, then measurement precision improves, but device complexity increases

Engineering Contradiction:
Improveenergy conversion precisionVSAvoidmotor structure
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent achieves precise mechanical energy conversion by controlling electrical parameters (voltage, frequency, waveform) applied to the electrostatic membranes. By changing these electrical parameters, precise control over membrane displacement, air pressure, and resulting mechanical output is achieved. This parameter-based control provides precision without requiring complex mechanical feedback systems or sensors.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables the creation of high-speed, low-torque or low-speed, high-torque motors suitable for various applications by converting electrical energy into mechanical energy efficiently, using inexpensive micro fabrication methods and roll-to-roll manufacturing techniques.

Implementation Method 1

first and second electrodes supported on portions of the first and second membranes that are over the displacement cavity. The electrodes are configurable to receive electrical drive signals that cause flexure of the portions of the first and second membranes over the displacement cavity.

Methodology Applied
Scientific EffectElectrostatic actuation: Electrostatics

Implementation Method 2

Flexure of the first and second membranes is translated into a linear reciprocating motion of the annular pushrod for rotating the motor gear in one direction, through displacement of air from the displacement cavity.

Methodology Applied
Scientific EffectPneumatic pressure: Pressure Gradient

Implementation Method 3

an annular pushrod mechanism coupled to the valve, the annular pushrod mechanism having a pair of pawls that protrude from an inner surface of the annular pushrod mechanism, an axle disposed in the chamber, and a motor gear disposed about the axle, the motor gear having a plurality of teeth that selectively engage with the pawls on the pushrod mechanism according to displacement of the annular pushrod mechanism.

Methodology Applied
Scientific EffectMechanical engagement: Gear

Data Source

PatentUS11456681B2Micro electrostatic actuated pneumatic driven motor
Publication Date: 2022.09.27 ENCITE LLC
  • US11456681B2 patent drawing
  • US11456681B2 patent drawing
  • US11456681B2 patent drawing

AI summary

Described is an electrically actuated, pneumatic driven motor. The pneumatic driven motor includes a body having first and second surfaces, the body having a chamber defined by an interior wall, a displacement cavity, and a passage that fluidly couples the displacement cavity to the chamber, a bleeder port and a bleeder port passage that fluidly couples the bleeder port to the chamber, a valve disposed in the passage between the displacement cavity and the chamber, an annular pushrod mechanism coupled to the valve, the annular pushrod mechanism having a pair of pawls that protrude from an inner surface of the annular pushrod mechanism, an axle disposed in the chamber; and a motor gear disposed about the axle, the motor gear having a plurality of teeth that selectively engage with the pawls on the pushrod mechanism according to displacement of the annular pushrod mechanism.