Micro-Grooved Installation Fixture for Elastomer Band Stress Reduction
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Solution Overview
Problem
Elastomer bands used to protect substrate supports in plasma etching environments degrade due to exposure to plasma and compression forces, leading to frequent replacements and chamber downtime.
Innovation Solution
An annular installation fixture with a top ring, clamp ring, and base ring, featuring micro-grooved surfaces to prevent sticking and a latch and release mechanism, is used to clamp and release the elastomer band, ensuring it is securely positioned around the substrate support with reduced stress and increased resistance to degradation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If an elastomer band is installed by hand in a 5-point star-shaped pattern, then the band can be positioned around the substrate support, but highly localized stress areas are created in the elastomer
Solution Approach 1:
The installation fixture pre-positions the elastomer band around the substrate support in a uniform circumferential pattern before the band is released onto the support. This preliminary uniform positioning prevents the localized stress concentrations that occur with manual 5-point star-shaped installation, while the fixture itself is easily operated.
2Strength
If the elastomer band is compressed to fit around the substrate support, then the band secures the components together, but compression forces cause degradation of the elastomer band
Solution Approach 1:
The clamping surfaces of the installation fixture are provided with non-stick coatings or micro-grooved surfaces at the specific locations where the elastomer band contacts the fixture during compression. This local modification reduces friction and prevents sticking, allowing the band to be compressed uniformly without localized stress concentrations that would accelerate degradation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The fixture extends the operational lifetime of the elastomer band by reducing degradation from plasma exposure and compression forces, thereby decreasing the frequency of replacements and minimizing chamber downtime.
Implementation Method 1
a clamping surface adapted to release the elastomer band on at least one least one of the lower surface of the clamp ring and/or the upper surface of the base ring
Data Source
AI summary
An apparatus and method adapted to mount an elastomer band in a mounting groove around a semiconductor substrate support used for supporting a semiconductor substrate in a plasma processing chamber, which includes an installation unit having a top ring, a clamp ring, and a base ring, and upon tightening of the top ring onto the base ring, the elastomer band is clamped between the clamp ring and the base ring, and a clamping surface adapted to release the elastomer band on at least one of a lower surface of the clamp ring and/or an upper surface of the base ring. A latch and release mechanism, which releases the elastomer band into the mounting groove by declamping the elastomer band from between the clamp ring and the base ring.