Micro-gyroscope with Oscillating Sample Masses for 3D Motion Detection
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Solution Overview
Problem
Current micro-gyroscopes require multiple devices to detect rotary motion in three-dimensional spaces, making them costly and difficult to produce and operate with high precision, and existing solutions for 3D gyroscopes are either theoretically impractical or sensitive to tolerances.
Innovation Solution
A micro-gyroscope design featuring oscillating sample masses attached to a substrate via anchors and anchor springs, driven radially in the X-Y plane to generate Coriolis forces, with sensor elements detecting deflections to determine rotational rates and accelerations along multiple axes, including a central anchor and sensor springs for orthogonal deflection, and a gimbal mount for precise separation of deflection motions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If three separate micro-gyroscopes are used to detect rotary motion about three axes, then measurement completeness is improved, but device complexity and cost increase
Solution Approach 1:
The patent combines three separate micro-gyroscope functions into a single integrated device. Multiple oscillating masses are arranged in specific configurations (e.g., tetrahedral arrangements with four masses, or planar arrangements with three masses) that allow simultaneous detection of rotational rates about all three axes. The sensor elements are positioned to detect Coriolis forces generated by oscillations in multiple directions, enabling one device to perform what previously required three separate devices.
Solution Approach 2:
The oscillating masses are designed to serve multiple detection functions simultaneously. Each mass can be driven to oscillate in different directions and can detect Coriolis forces from rotations about different axes. For example, a single oscillating mass can detect rotation about one axis when oscillating in a particular direction, and detect rotation about another axis when oscillating in a perpendicular direction, making the sensor universally capable of measuring all three rotational components.
2Measurement precision
If oscillating masses are driven radially in the X-Y plane to generate Coriolis forces, then rotational detection accuracy is improved, but manufacturing precision requirements increase
Solution Approach 1:
The patent employs asymmetric arrangements of oscillating masses and spring elements that are deliberately designed to be insensitive to certain manufacturing tolerances. For example, the spring configurations and mass positions are arranged such that small deviations from ideal alignment do not significantly affect the Coriolis force detection, as the asymmetric geometry provides inherent tolerance to misalignment in specific directions.
Solution Approach 2:
The patent optimizes physical parameters such as spring stiffness, mass distribution, and oscillation amplitude to reduce sensitivity to manufacturing variations. By carefully selecting and adjusting these parameters, the system achieves high rotational detection accuracy even with moderate manufacturing tolerances. For instance, adjusting the spring constants and mass positions can decouple the detection sensitivity from precise alignment requirements.
3Adaptability or versatility
If anchor springs are designed to allow deflection in multiple directions, then 3D motion capture capability is improved, but spring construction complexity increases
Solution Approach 1:
The patent divides the suspension system into multiple independent spring elements, each responsible for specific degrees of freedom. Instead of using a single complex spring that must handle all directions of motion, the system uses multiple simpler spring elements arranged in specific configurations. Each spring element can be optimized for its specific function, and the collective arrangement provides the necessary multi-directional deflection capability.
Solution Approach 2:
The patent transitions from planar spring constructions to three-dimensional spring arrangements. By introducing vertical and angular dimensions to the spring construction, the system achieves multi-directional deflection capability. For example, springs are arranged at different angles and heights, allowing the oscillating masses to deflect in multiple directions while maintaining simple individual spring designs.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design allows for a simple, cost-effective, and precise 3D or higher-dimensional sensor capable of capturing rotational and acceleration data with high accuracy, enabling simultaneous detection of multiple orthogonal components without the limitations of previous solutions.
Implementation Method 1
excited to oscillate opposed each other, that is, radially in the X-Y plane, in order to be subjected to Coriolis forces when the substrate rotates. Sensor elements, particularly electrodes disposed below the sample masses, detect deflections of the sample masses due to the Coriolis forces that arise from X and/or Y rotational rates
Data Source
AI summary
The invention relates to a micro-gyroscope for detecting motions relative to an X and/or Y and Z axis, particularly as a 3D, 5D, or 6D sensor. Sample masses are disposed uniformly about an anchor and can be driven radially relative to the central anchor. Anchor springs are disposed to attach the sample masses to a substrate, and these sample masses can be deflected both radially within and out of the X-Y plane. A sensor mass is disposed on one-of the sample masses by means of sensor springs, and the sensor springs allow deflection of the sensor mass within the plane of the sample mass, and orthogonal to the radial drive direction of the sample masses. Drive elements oscillate these sample masses in the X-Y plane, and sensor elements captures the defection of the sample masses due to the Coriolis forces generated when the substrate is rotated.