Micro Heating Sensor Electrodes Using Conductive Oxides
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional micro heating and sensing devices with metal electrodes face challenges in manufacturing complexity, increased production costs, and poor contact issues due to the need for multiple deposition steps and passivation layers, leading to instability and inefficiency in gas sensing applications.
Innovation Solution
The use of conductive oxides or conductive nitrides as replacement materials for metal electrodes, combined with additional conductive substances for circuit connections, simplifies the manufacturing process, enhances electrical conductivity, and reduces thermal conductivity, while maintaining measurement, temperature control, and thermal insulation capabilities.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If metal electrodes are used in conventional micro heating and sensing devices, then electrical conductivity is achieved, but manufacturing complexity increases due to multiple deposition steps and passivation layers
Solution Approach 1:
The patent extracts and removes the passivation layer from the device structure, eliminating the need for multiple deposition steps and simplifying the manufacturing process while maintaining the functional integrity of the metal electrodes
Solution Approach 2:
The patent combines the functions of the electrode and passivation layer into a single integrated structure, where the metal electrode serves both electrical conduction and protection functions, reducing the number of separate components and manufacturing steps
2Reliability
If multiple deposition steps and passivation layers are used, then electrode protection is improved, but production costs increase
Solution Approach 1:
The patent removes unnecessary passivation layers and deposition steps, reducing material costs and manufacturing expenses while maintaining adequate electrode protection through simplified structural design
Solution Approach 2:
The patent uses simpler, less expensive materials and processes that can be easily replaced or reconfigured, reducing the overall production cost while maintaining functional performance
3Loss of energy
If extremely thin metal electrodes are used, then heat conduction is reduced, but contact quality deteriorates due to level differences with heating layers
Solution Approach 1:
The patent applies different thicknesses or material properties to different regions of the electrode structure, ensuring good contact quality at the heating interface while maintaining low heat conduction in other areas
Solution Approach 2:
The patent introduces an intermediary layer or structural feature that facilitates good thermal and electrical contact between the electrode and heating layer, eliminating the contact issues caused by level differences
4Reliability
If passivation layers are coated on electrode surfaces, then electrode poisoning is prevented, but manufacturing time increases
Solution Approach 1:
The patent eliminates the passivation layer coating process, reducing manufacturing time while maintaining electrode stability through alternative protective designs or material selections
Solution Approach 2:
The patent incorporates protective features during the initial electrode formation process rather than adding them as separate subsequent steps, reducing overall manufacturing time while ensuring electrode stability
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces manufacturing complexity and costs, improves electrode stability, and enhances the accuracy and efficiency of gas sensing and temperature control by minimizing heat loss and electrode poisoning, thereby improving the overall performance of micro heating and sensing devices.
Implementation Method 1
The resistance-type gas sensor uses metal electrodes to heat heating plates made of metal oxides. When oxygen in air is in contact with the metal oxides (such as tin(IV) oxide), the oxygen takes electrons away from the metal oxides so that electrical resistance raises.
Implementation Method 2
When oxygen in air is in contact with the metal oxides (such as tin(IV) oxide), the oxygen takes electrons away from the metal oxides so that electrical resistance raises. When gas in air users intend to detect (such as flammable gas) are getting closer, it reacts with oxygen around the sensor and the electrons are returned to the metal oxides so that electrical resistance decreases.
Implementation Method 3
a surface of the electrode is covered with a passivation layer made of insulation materials to reduce poisoning of the electrode caused by contact with external gases for protection of the electrode
Implementation Method 4
extremely thin metal electrodes are used in order to prevent heat conduction during fabrication of the electrodes
Data Source
AI summary
A method of manufacturing a micro heating and sensing device and a device thereof are provided. The micro heating and sensing device includes a substrate, a first electrode layer, a first connection electrode layer, a conductive layer, a second connection electrode layer, and a second electrode layer. By replacement of one end of the metal electrode or the entire metal electrode with conductive oxides or conductive nitrides, problems of micro heating and sensing devices available now including poor contact in electrode connections and needs of passivation layers disposed at the rear end of the electrodes can be overcome. Both cost and time for manufacturing process are reduced.