Micro LED Optical Cavity Structure for Pixel Crosstalk Isolation

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Solution Overview

Problem

High-resolution micro LED displays face issues with light emission spreading between neighboring pixels, leading to color purity deterioration and electrical connection defects due to thermal mismatches during manufacturing.

Innovation Solution

A display apparatus design featuring a substrate with a driving layer, semiconductor layers, and a reflective layer with a distributed Bragg reflector, along with an isolation structure and current spreading layers, to reduce beam divergence and enhance color purity, and a manufacturing method involving epitaxial substrate processing and fusion bonding for improved electrical connections.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If the pitch between neighboring pixels is decreased to increase resolution, then the resolution is improved, but light emitted from pixels spreads to neighboring pixels causing color purity deterioration

Engineering Contradiction:
ImproveresolutionVSAvoidcolor purity
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The patent introduces isolation structures (such as ion-implanted regions or etched grooves) that segment the light emission paths between neighboring pixels. These structures physically divide the light propagation space, preventing light from one pixel from spreading to adjacent pixels, thereby maintaining color purity even at high resolutions with reduced pitch.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent employs intermediate layers or structures (such as color conversion layers, quantum dot layers, or optical isolation layers) positioned between the light-emitting active layer and the surrounding environment. These intermediary layers act as optical barriers or filters that confine light within the intended pixel region, preventing cross-contamination of light between neighboring pixels.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Adaptability or versatility

If driving elements and LEDs are manufactured separately and bonded together, then manufacturing flexibility is improved, but defects are formed in electrical connection portions during bonding and unstable bonds are formed due to thermal mismatches

Engineering Contradiction:
Improvemanufacturing flexibilityVSAvoidelectrical connection stability
Core Design Contradiction:
Adaptability or versatilityVSReliability

Solution Approach 1:

The patent merges the driving element manufacturing process with the LED manufacturing process by integrating the formation of electrical connection structures (such as metal interconnect layers, contact holes, and bonding pads) into the same fabrication sequence. This combined approach eliminates separate bonding steps, thereby preventing bonding-related defects and thermal mismatch issues while maintaining manufacturing flexibility through standardized semiconductor fabrication processes.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent performs preliminary formation of electrical connection structures and isolation structures during the LED fabrication process before final assembly. By pre-forming contact holes, metal layers, and bonding interfaces with proper alignment and electrical properties, the patent ensures stable electrical connections are established before the devices are fully assembled and operated, preventing connection defects.

Inventive Principle:
Principle #10Preliminary action

3Object-affected harmful factors

If a mesa structure is used to isolate active layers, then light emission isolation is improved, but manufacturing complexity increases due to additional etching and structural formation steps

Engineering Contradiction:
Improvelight emission isolationVSAvoidmanufacturing process complexity
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The patent extracts the light isolation function from the traditional mesa structure by removing the need for deep lateral etching and complex side-wall formation. Instead, the patent uses planar or minimally structured isolation approaches where isolation structures are formed as simple surface-level features or embedded layers that provide sufficient optical isolation without requiring the full three-dimensional mesa geometry, thereby reducing manufacturing complexity.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent applies local quality by providing isolation structures only in specific regions where light emission control is needed, rather than forming complete mesa structures around entire active layers. The isolation is implemented locally at critical interfaces or boundaries using ion implantation, thin film deposition, or shallow etching, maintaining sufficient light isolation while minimizing additional manufacturing steps and structural complexity.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively reduces beam divergence, minimizes crosstalk between pixels, and increases color purity while simplifying the manufacturing process by using a mesa-free structure and distributed Bragg reflector, leading to improved light emission efficiency and reduced defects.

Implementation Method 1

The reflective layer may include a distributed Bragg reflector. The distributed Bragg reflector may include first layers having a first refractive index and second layers having a second refractive index that are alternately provided

Methodology Applied
Scientific EffectBragg reflection: Bragg Diffraction

Implementation Method 2

light emitted from the active layer resonates between the first electrode and the reflective layer

Methodology Applied
Scientific EffectOptical resonance: Resonance

Implementation Method 3

The isolation structure may include an ion-implanted region

Methodology Applied
Scientific EffectIon implantation: Ion Implantation

Data Source

PatentUS12100340B2Display apparatus and method of manufacturing the same
Publication Date: 2024.09.24 SAMSUNG ELECTRONICS CO LTD
  • US12100340B2 patent drawing
  • US12100340B2 patent drawing
  • US12100340B2 patent drawing

AI summary

Provided is a display apparatus including a plurality of subpixels and configured to emit light based on each of the plurality of subpixels, the display apparatus including a substrate, a driving layer provided on the substrate and including a driving element which is configured to apply current to the display apparatus, a first electrode electrically connected to the driving layer, a first semiconductor layer provided on the first electrode, an active layer provided on the first semiconductor layer, a second semiconductor layer provided on the active layer, a second electrode provided on the second semiconductor layer, and a reflective layer provided on the second semiconductor layer, wherein light emitted from the active layer resonates between the first electrode and the reflective layer.