Micro LED Array Inspection Optics for Accurate Pixel Defect Detection
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Solution Overview
Problem
Conventional methods struggle to accurately detect pixel defects in micro LED array panels due to their small light emitting areas and the interference caused by optical components, leading to weakened light collection and reduced image accuracy.
Innovation Solution
An inspecting tool with an optical collector group comprising a first and second optical collector, connected to an image detector and light measuring device, allows for simultaneous light collection and image capture by rotating the fixture element to align collectors with the micro LED array, ensuring adequate detection area and minimizing light interference.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of moving object
If a single optical collector is used to collect light from the micro LED array, then the collecting area can be reduced to match the small light emitting area, but the light intensity is insufficient for accurate detection
Solution Approach 1:
The optical collector is divided into multiple independent optical collectors (first optical collector, second optical collector, etc.), each capable of collecting light from different positions or angles. This segmentation allows the system to maintain a compact overall size while achieving sufficient total light collection area and intensity through multiple smaller collectors working in parallel.
2Productivity
If the light collecting process and image collecting process are performed at the same time, then the detection efficiency is improved, but the light entered into the optical collector is weakened, thereby decreasing the image accuracy
Solution Approach 1:
The optical collection system is segmented into multiple independent optical collectors, each dedicated to specific detection functions. This allows simultaneous light collection and image collection without signal interference, as each collector processes its designated signal path independently, maintaining both detection efficiency and measurement precision.
Solution Approach 2:
The patent introduces an optical switching mechanism or beam splitter as an intermediary that directs light from different micro LED regions to different detectors. This intermediary enables simultaneous multi-functional detection by properly routing optical signals, preventing signal weakening while maintaining detection efficiency.
3Measurement precision
If operators review wafer, chip, and mask through graphical user interface displaying pattern images, then pixel defects can be identified, but the detection process is time-consuming and labor-intensive
Solution Approach 1:
The inspection system incorporates automated image processing and defect analysis algorithms that enable the system to self-evaluate the collected images and identify pixel defects automatically. This self-service capability eliminates the need for manual operator review of graphical user interfaces, significantly reducing detection time while maintaining or improving defect identification accuracy through consistent automated analysis.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances detection efficiency and accuracy by enabling effective light collection and image capture, overcoming the limitations of conventional methods in micro LED array panel inspection.
Implementation Method 1
an optical collector group configured to collect light emitted from a micro LED array included in the micro LED array panel
Implementation Method 2
an image detector connected with the optical collector group to receive the light collected by the optical collector group, and configured to capture an image of the micro LED array
Data Source
AI summary
An inspecting tool for inspecting a micro LED array panel (00) comprises: an optical collector group (01) configured to collect light emitted from a micro LED array included in the micro LED array panel (00): an image detector (02) connected with the optical collector group (01) to receive the light collected by the optical collector group (01) and to capture an image of the micro LED array: and. a light measuring device (03) electrically connected with the optical collector group (01) to receive the light collected by the optical collector group (01) and to measure the light emitted from one or more portions of the micro LED array. The optical collector group (01) comprises a first optical collector (101) connected with the image detector (02) and a second optical collector (102) electrically connected with the light measuring device (03); the first optical collector (101) and the second optical collector (102) are configured on a fixture element (104); and, the fixture element (104) is rotatable at any direction. This inspecting tool can increase the image accuracy.