Micro-LED Flip-Bonding via Laser Heating for Submount Alignment
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Solution Overview
Problem
The difference in coefficient of thermal expansion between a sapphire substrate and a Si-based submount substrate during flip-bonding of micro-LED modules leads to misalignment and electrical issues such as shorting, making precise bonding challenging.
Innovation Solution
The method involves using laser beams to locally heat and melt solders between the micro-LED and submount substrate, allowing for precise bonding without applying heat to the substrates, thus minimizing thermal expansion and contraction effects.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional heating methods are used to melt solder during flip-bonding, then solder bonding is achieved, but substrate misalignment occurs due to differential thermal expansion
Solution Approach 1:
The patent replaces conventional thermal heating methods with laser beam irradiation to melt the solder. The laser beam is focused on the solder bump to locally heat and melt it, enabling flip-bonding without heating the entire substrate. This substitution of heating method eliminates differential thermal expansion between substrates with different coefficients of thermal expansion, thereby preventing misalignment while achieving reliable solder bonding.
2Strength
If high melting point solder is used to achieve strong bonding, then bonding strength is improved, but substrate misalignment worsens due to higher required heating temperature
Solution Approach 1:
The patent uses laser beam irradiation instead of conventional thermal heating to melt the high melting point solder. The laser provides localized heating only at the solder bump, allowing the solder to reach its melting point and achieve strong bonding without heating the entire substrate to high temperatures. This eliminates the differential thermal expansion problem that would otherwise occur at high temperatures, maintaining alignment precision while achieving strong bonding.
Solution Approach 2:
The laser beam is focused to heat only the local region where the solder bump is located, rather than heating the entire substrate. This localized heating approach allows the solder to be melted and bonded without causing thermal expansion of the substrates, thereby maintaining alignment precision while achieving the bonding strength required for high melting point solder.
3Reliability
If uniform heating is applied to melt solder, then complete solder melting is achieved, but substrate warping and misalignment occur
Solution Approach 1:
The patent applies laser beam irradiation that is focused on the solder bump to achieve local heating. This localized heating melts the solder completely for reliable bonding without heating the entire substrate, thereby preventing substrate warping and maintaining substrate flatness. The selective heating of only the solder region eliminates the differential thermal expansion that would cause misalignment.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach effectively prevents misalignment and ensures reliable electrical connections by hardening the solders to secure the micro-LED to the submount substrate, improving bonding precision and reducing defects.
Implementation Method 1
heating the plurality of solders by a laser
Implementation Method 2
locally heating the plurality of solders by a plurality of laser beams
Implementation Method 3
heating the plurality of solders by a laser... heating the plurality of solders by a plurality of laser beams
Implementation Method 4
hardening the solders to secure the micro-LED to the submount substrate
Implementation Method 5
large differences in expansion and contraction strains between the Si-based submount substrate and the sapphire substrate upon heating and cooling... coefficient of thermal expansion of the sapphire substrate amounts to about 2.5 times that of the Si-based submount substrate
Data Source
AI summary
A method for fabricating a micro-LED module is disclosed. The method includes: preparing a micro-LED including a plurality of electrode pads and a plurality of LED cells; preparing a submount substrate including a plurality of electrodes corresponding to the plurality of electrode pads; and flip-bonding the micro-LED to the submount substrate through a plurality of solders located between the plurality of electrode pads and the plurality of electrodes. The flip-bonding includes heating the plurality of solders by a laser.


