Micro-LED Transfer Using Sacrificial Posts to Eliminate Pickup Heads

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Solution Overview

Problem

Current micro-LED transfer methods using pickup heads are complex and face challenges in yield and stability, making them inefficient for high-quality micro-LED production.

Innovation Solution

A micro-LED transfer method involving the formation of sacrificial posts on a carrier substrate, bonding with a pickup substrate using a polymer layer, and transferring micro-LEDs to a receiving substrate through controlled lifting-off using different bonding layers and release mechanisms, eliminating the need for a complicated pickup head.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a pickup head is used to transfer micro-LEDs, then micro-LEDs can be transferred to a receiving substrate, but the transfer process becomes complicated and yield and stability deteriorate

Engineering Contradiction:
Improvetransfer stabilityVSAvoidpickup head complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The invention extracts and eliminates the pickup head component from the transfer system. Instead of using a pickup head to grasp and transfer micro-LEDs, the method uses a carrier substrate with sacrificial posts that enable direct bonding and release of micro-LEDs, removing the complex pickup head mechanism entirely

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The invention introduces a carrier substrate with sacrificial posts as an intermediary element. The sacrificial posts serve as temporary bonding structures that facilitate micro-LED transfer without requiring a pickup head. The posts are bonded to micro-LEDs, enable transfer to the receiving substrate, and are then removed, providing a simple intermediary mechanism

Inventive Principle:
Principle #24Intermediary (Mediator)

2Ease of manufacture

If a pickup head is used to transfer micro-LEDs, then micro-LED transfer can be achieved, but manufacturing complexity and costs increase

Engineering Contradiction:
Improvetransfer process simplicityVSAvoidpickup head structure
Core Design Contradiction:
Ease of manufactureVSDevice complexity

Solution Approach 1:

The invention removes the pickup head component entirely from the manufacturing process. The transfer is achieved through a simplified process using a carrier substrate with sacrificial posts that can be bonded, transferred, and released without any pickup head structure

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The sacrificial posts are designed as temporary, disposable structures that are bonded to micro-LEDs for transfer and then removed after serving their purpose. This eliminates the need for expensive, complex pickup head structures while achieving the same transfer function

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method simplifies the transfer process, improves yield and stability, and reduces costs by eliminating the need for a pickup head, enabling efficient large-scale processing and enhancing the quality of micro-LED devices.

Implementation Method 1

the melting point of the first bonding layer is lower than 280° C., and the micro-LEDs to be picked up are lifted-off from the carrier substrate through heating

Methodology Applied
Scientific EffectMelting: Melting

Implementation Method 2

the second bonding layer is a photo resist

Methodology Applied
Scientific EffectPhotopolymerisation: Photopolymerisation

Implementation Method 3

the micro-LED is lifted-off from the pickup substrate through at least one of solvent dissolving, thermal release, optical release, and mechanical release

Methodology Applied
Scientific EffectLaser heating: Laser

Data Source

PatentUS10586886B2Micro-LED transfer method and manufacturing method
Publication Date: 2020.03.10 GOERTEK INC
  • US10586886B2 patent drawing
  • US10586886B2 patent drawing
  • US10586886B2 patent drawing

AI summary

A micro-LED (3r) transfer method and a manufacturing method are disclosed. The micro-LED (3r) transfer method comprises: forming a sacrificial post (4) on a micro-LED (3r) to be picked-up on a carrier substrate (1); bonding the micro-LED (3r) to be picked-up with a pickup substrate (5) via the sacrificial post (4); lifting-off the micro-LED (3r) to be picked-up from the carrier substrate (1); bonding the micro-LED (3r) on the pickup substrate (5) with a receiving substrate (12); and lifting-off the micro-LED (3r) from the pickup substrate (5). A complicated pickup head is not necessary, and the technical solution is relatively simple.