Micro-LED Directionality via Slotted Antennas and Quantum Well Intermixing

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Solution Overview

Problem

Current μ-LED technologies face challenges in achieving high directionality and reducing non-radiative recombination, leading to inefficiencies in light emission and short lifespan, especially in small form factors required for augmented reality and automotive applications.

Innovation Solution

The use of slotted antenna structures and quantum well intermixing techniques to enhance radiative recombination, combined with specific doping processes and annealing steps, helps in reducing non-radiative recombination and improving the efficiency and longevity of μ-LEDs.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If μ-LED size is reduced for small form factor applications, then device miniaturization is achieved, but light emission efficiency and lifespan deteriorate due to increased non-radiative recombination

Engineering Contradiction:
Improveμ-LED form factorVSAvoidnon-radiative recombination loss
Core Design Contradiction:
Volume of moving objectVSLoss of energy

Solution Approach 1:

The patent applies local quality by creating a quantum well structure with specific compositional gradients in the active region. The quantum well contains intermediate composition layers that locally modify the band structure to enhance radiative recombination probability, while the surrounding barrier layers provide confinement. This local structural optimization addresses the non-radiative recombination issue specifically in the critical active region without requiring overall device enlargement.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent employs composite materials by combining multiple semiconductor layers with different compositions (e.g., InGaN quantum wells with GaN barriers, or AlInGaP layers). This composite structure creates quantum confinement effects and strain engineering that improve radiative efficiency. The heterogeneous material system allows optimization of each layer's properties to collectively enhance light emission while maintaining small device dimensions.

Inventive Principle:
Principle #40Composite materials

2Ease of manufacture

If conventional doping processes are used in small μ-LEDs, then manufacturing simplicity is maintained, but defect density increases leading to reduced reliability

Engineering Contradiction:
Improvedoping process simplicityVSAvoiddevice lifespan
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent applies preliminary action by performing low-temperature doping processes before high-temperature annealing steps. The initial doping at lower temperatures prevents excessive diffusion and defect formation, while the subsequent annealing step activates the dopants and repairs radiation damage. This sequential approach maintains manufacturing feasibility while significantly improving device reliability and reducing defect density in the final product.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent utilizes parameter changes by optimizing doping temperatures, annealing temperatures, and processing times specifically for micro-LED dimensions. The doping temperature is controlled to be lower than conventional processes to prevent defect formation, while annealing temperature and duration are optimized to activate dopants without causing excessive diffusion. These parameter adjustments maintain ease of manufacture while dramatically improving reliability.

Inventive Principle:
Principle #35Parameter changes

3Device complexity

If standard light extraction methods are used, then device structure simplicity is maintained, but light emission directionality is insufficient for augmented reality applications

Engineering Contradiction:
Improvedevice structureVSAvoidlight directionality
Core Design Contradiction:
Device complexityVSIllumination intensity

Solution Approach 1:

The patent applies curvature principles by incorporating microlens arrays or dome-shaped encapsulation layers over the μ-LED chips. These curved optical elements refract and redirect light rays to achieve tighter beam convergence and improved directionality. The curved surfaces are optimized to collimate light without requiring complex multi-element optical systems, thus maintaining relatively simple device structure while achieving the directional control needed for augmented reality applications.

Inventive Principle:
Principle #14Spheroidality (Curvature)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach results in improved light emission efficiency, extended lifespan, and enhanced performance of μ-LEDs, particularly in small form factors, by minimizing defects and increasing the ratio of radiative to non-radiative recombination.

Implementation Method 1

enhance radiative recombination, combined with specific doping processes and annealing steps, helps in reducing non-radiative recombination and improving the efficiency

Methodology Applied
Scientific EffectRadiative recombination: Electroluminescence

Implementation Method 2

The use of slotted antenna structures and quantum well intermixing techniques to enhance radiative recombination

Methodology Applied
Scientific EffectQuantum well intermixing:

Implementation Method 3

combined with specific doping processes and annealing steps, helps in reducing non-radiative recombination

Methodology Applied
Scientific EffectAnnealing: Annealing

Data Source

PatentUS20220102583A1µ-led, µ-led device, display and method for the same
Publication Date: 2022.03.31 OSRAM OPTO SEMICON GMBH & CO OHG
  • US20220102583A1 patent drawing
  • US20220102583A1 patent drawing
  • US20220102583A1 patent drawing

AI summary

The invention relates to various aspects of a μ-LED or a μ-LED array for augmented reality or lighting applications, in particular in the automotive field. The μ-LED is characterized by particularly small dimensions in the range of a few μm.