Micro LED Display Substrate Common Electrode Mass Transfer
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The existing micro LED display technology faces challenges in accurately positioning and connecting the micro LEDs to an array substrate during mass transfer, requiring high stability and accuracy, which increases the difficulty and complexity of the process.
Innovation Solution
A micro light emitting diode display substrate is designed with a common electrode layer connected to the second electrodes of the micro LEDs, an interlayer insulating layer with via holes exposing the first electrodes, and first connection electrodes filling these holes, reducing the need for precise alignment of all electrodes and simplifying the mass transfer process by allowing only the first electrodes to be aligned and connected.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If mass transfer technology is used to transfer micro LEDs to array substrate, then productivity is improved, but manufacturing precision deteriorates due to difficulty in accurate positioning and connection of multiple electrodes
Solution Approach 1:
The electrode connection structure is segmented into two independent parts: a common electrode layer connected to second electrodes (anode/cathode) and separate first connection electrodes connected to first electrodes. This segmentation allows the common electrode to be formed by a simple full-layer deposition process without requiring precise alignment, while only the first connection electrodes need accurate positioning during mass transfer, thereby resolving the contradiction between mass transfer efficiency and electrode alignment accuracy
Solution Approach 2:
The common electrode layer is formed in advance on the entire surface before the mass transfer process. This preliminary action eliminates the need for precise alignment during the transfer step, as the common electrode is already in its final position and only the first connection electrodes require alignment, thus improving both productivity and manufacturing precision
2Manufacturing precision
If precise alignment of all electrodes is required during mass transfer, then manufacturing precision is improved, but device complexity increases due to higher process difficulty
Solution Approach 1:
The electrode system is divided into two independent connection systems: common electrode connections (formed by full-layer deposition requiring no alignment) and first electrode connections (requiring precise alignment). This segmentation reduces the overall process complexity by eliminating the need for complex multi-electrode alignment procedures
Solution Approach 2:
The common electrode layer serves multiple functions simultaneously: it provides electrical connection to all second electrodes, acts as a reference plane for the display structure, and eliminates the need for complex alignment procedures. This multi-functionality simplifies the overall manufacturing process while maintaining high precision
Data Source
AI summary
Provided are micro light emitting diode display substrate, device and fabrication method thereof. The micro light emitting diode display substrate includes: a first base substrate; micro light emitting diodes on the first base substrate and including first and second electrodes; a common electrode layer on a side of a layer where the first and second electrodes are located away from the first base substrate, and electrically connected to the second electrodes of the micro light emitting diodes and spaced apart from the first electrodes; an interlayer insulating layer on a side of the common electrode layer away from the first base substrate and having via holes exposing the first electrodes of the micro light emitting diodes, respectively; first connection electrodes on a side of the interlayer insulating layer away from the first base substrate, and filling the via holes to be electrically connected to the first electrodes, respectively.