Micro-machined Imaging Interferometer with Static Cavity
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Solution Overview
Problem
The production of micro-machined spectrometer devices with integrated interferometer and imaging functions is hindered by the delicate polishing step required to create an inclined semi-reflective diopter, which can lead to manufacturing failures if not executed correctly, necessitating reiteration of the entire process without the use of a transfer lens between the interferometric block and the imager.
Innovation Solution
A micro-machined optical measuring device is designed with a set of photosensitive detector elements on a first support and a second support forming a semi-reflective interface at a non-zero angle, allowing for an interferometric cavity without parallel surfaces, enabling independent formation and assembly of components to achieve a static interferometric function without a transfer lens.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a polishing step is performed on the substrate to create an inclined semi-reflective diopter, then the interferometer function is achieved, but the manufacturing reliability deteriorates due to the delicate nature of the polishing process
Solution Approach 1:
The device is divided into two independent supports: a first support carrying the imager and a second support carrying the interferometric function. This segmentation eliminates the need for polishing the imager substrate, as the inclined semi-reflective diopter is created on a separate, dedicated support that can be manufactured independently without risking the imager.
Solution Approach 2:
A second support acts as an intermediary element between the imager and the inclined face. This intermediary carries the semi-reflective diopter and positions it relative to the imager without requiring direct modification of the imager substrate, thus protecting the imager from delicate polishing operations.
2Ease of manufacture
If the photosensitive detector elements are formed independently of the second support, then the ease of manufacture is improved, but the device complexity increases due to the assembly process
Solution Approach 1:
The device is segmented into independently manufacturable supports that are subsequently assembled. The photosensitive detector elements are formed on the first support independently of the second support, allowing each component to be optimized and manufactured separately before being combined into the final device.
Solution Approach 2:
Independently manufactured supports carrying different functions (imaging and interferometry) are merged through assembly. This combining of independently optimized components achieves the desired functionality while maintaining manufacturing simplicity for each individual component.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution allows for precise assembly and operation of the device, enabling the production of interferograms and spectral analysis without reiterating the manufacturing process, improving spectral resolution and fringe contrast while eliminating the need for a transfer lens.
Implementation Method 1
the second face forming a semi-reflective interface or strip
Implementation Method 2
an interferometric cavity is made between the second face and said photosensitive detector elements
Data Source
AI summary
A micro-machined optical measuring device including: a set of photosensitive detector elements situated on a given face of a first support; a second support, assembled to the first support, forming a prism and including a first face through which a visible radiation is intended to penetrate and a second face, forming a non-zero angle θ with the first face and a non-zero angle α with the given face of the first support, the second face being semi-reflective, the first support and the second support being positioned such that an interferometric cavity is made between the second face and the given face, the distance between the given face of the first support and the second face of the second support varying regularly.