Micro Mirror Array for Electromagnetic Radiation Sensing
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Solution Overview
Problem
Current electromagnetic radiation detection technologies, such as those using multi-layered cantilevers, face challenges in accurately measuring radiation distribution and intensity due to complexity and high production costs, limiting their applicability in low-cost, high-volume applications like infrared imaging.
Innovation Solution
The proposed solution involves an electromagnetic radiation sensing apparatus with an array of micro mirrors, a light source, a lens, an imaging surface, and a photodetector, where micro mirrors rotate in response to radiation intensity, causing distinct light spot displacements on the imaging surface, allowing for precise measurement of radiation distribution and intensity without complex optical components.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multi-layered cantilevers are used to detect electromagnetic radiation, then measurement capability is provided, but device complexity and production cost increase
Solution Approach 1:
The patent replaces complex multi-layered cantilever structures with a simpler micro-mirror array system. Instead of using mechanical cantilevers that bend under heat, the invention uses micro-mirrors that rotate in response to radiation intensity changes, converting a complex mechanical measurement system into a more manageable optical reflection system that achieves the same measurement goal with reduced complexity
Solution Approach 2:
The patent extracts and separates the radiation detection function from the complex cantilever structure. By using individual micro-mirrors that can be independently controlled and measured, the system isolates the measurement function into simpler, discrete elements that can be manufactured and calibrated more easily than integrated multi-layered cantilevers
2Measurement precision
If multi-layered cantilevers are used to detect electromagnetic radiation, then measurement capability is provided, but production cost increases
Solution Approach 1:
The patent employs micro-mirrors that can be manufactured using standard semiconductor fabrication techniques, making them significantly cheaper to produce than multi-layered cantilever structures. The micro-mirrors are designed to be replaceable and can be produced in high volumes at low cost, enabling economical infrared imaging applications
Solution Approach 2:
By replacing the expensive multi-layered cantilever mechanical structure with a micro-mirror array that uses optical reflection principles, the patent reduces material costs and manufacturing complexity. The micro-mirrors require fewer layers and simpler fabrication processes, directly lowering production costs while maintaining measurement precision
3Measurement precision
If complex optical components are used, then measurement accuracy is improved, but device complexity increases
Solution Approach 1:
The patent makes the micro-mirrors serve multiple functions: they act as both the radiation detection elements and the optical components for signal readout. The same micro-mirror that detects radiation also reflects light to indicate its position and state, eliminating the need for separate optical components and reducing overall device complexity while maintaining measurement accuracy
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach simplifies calibration, improves accuracy, and reduces costs by using a straightforward optical setup to measure radiation intensity, making it suitable for low-cost, high-volume infrared imaging applications like human presence detection and environmental monitoring.
Implementation Method 1
Each of the micro mirrors has a radiation absorbing surface
Implementation Method 2
rotate in response to a intensity of the sensed radiation
Implementation Method 3
Each of the micro mirrors has a light reflecting area that reflects the light onto the imaging surface to form a light spot
Implementation Method 4
a photodetector with an imaging surface to form an image of light spots reflected by the micro mirrors
Data Source
AI summary
Systems, methods, and apparatus for providing electromagnetic radiation sensing. The apparatus includes a radiation detection sensor including a plurality of micromechanical radiation sensing pixels having a reflecting top surface and configured to deflect light incident on the reflective surface as a function of an intensity of sensed radiation. In some implementations, the apparatus has equal sensitivities for at least some of the sensing pixels. In some implementations, the apparatus can provide adjustable sensitivity and measurement range. The apparatus can be utilized for human detection, fire detection, gas detection, temperature measurements, environmental monitoring, energy saving, behavior analysis, surveillance, information gathering and for human-machine interfaces.