Micro Mount Part Cooling for Focused Charged Particle Beam Processing
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Solution Overview
Problem
Current charged particle beam processing apparatuses face challenges in rapidly cooling samples without inducing thermal drift, as cooling the entire sample stage leads to prolonged stabilization times and temperature gradients, affecting processing accuracy.
Innovation Solution
A processing apparatus with a micro sample stage and a thermally independent micro mount part, equipped with a cooling unit, such as an electronic cooling mechanism or a cooling tube, that allows for rapid cooling of the sample while minimizing heat conduction to the sample stage, thereby reducing thermal drift and improving processing accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If the entire sample stage is cooled, then the sample can be cooled for processing, but it takes a long time to stabilize the temperature and generates temperature gradients causing thermal drift
Solution Approach 1:
The patent divides the cooling system into segments: a small micro mount part (10-100 μm) that holds the micro sample is thermally isolated from the larger micro sample stage. Only the micro mount part is actively cooled, while the stage remains at room temperature. This segmentation allows rapid cooling of the sample without cooling the entire stage, thus reducing thermal drift and minimizing temperature stabilization time.
2Temperature
If the entire sample stage is cooled, then the sample can be cooled for processing, but temperature gradients are generated causing thermal drift
Solution Approach 1:
The cooling function is segmented and applied only to the micro mount part rather than the entire stage, eliminating temperature gradients across the stage that would cause thermal drift and improve processing accuracy.
Solution Approach 2:
The patent applies different thermal properties to different parts: the micro mount part has high thermal conductivity for efficient cooling, while the micro sample stage has low thermal conductivity to prevent heat transfer from the stage to the cooled mount part. This local differentiation of thermal properties enables effective sample cooling without stage temperature gradients.
3Loss of time
If a small micro sample stage with thermally independent micro mount part is used, then rapid cooling and reduced thermal drift are achieved, but the device structure becomes more complex
Solution Approach 1:
The device is segmented into functionally independent parts: the micro sample stage and the micro mount part with its own cooling unit. This segmentation, while adding structural elements, creates a modular design where the cooling system is localized and can be independently controlled, potentially simplifying overall system management despite increased component count.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus effectively reduces thermal drift and enhances processing accuracy by promptly cooling the sample and its mount part, minimizing position shifts due to thermal expansion and contraction, and allowing for precise cutting and observation of samples.
Implementation Method 1
the micro mount part is thermally independent of the micro sample stage and has a cooling unit which cools the micro mount part
Data Source
AI summary
A processing apparatus uses a focused charged particle beam to process a micro sample that is supported on a micro mount part. The micro mount part is supported on a micro sample stage and locally cooled by a cooling unit. The micro mount part is thermally independent of the micro sample stage and, due to its small size, can be cooled rapidly by the cooling unit.