Micro Movable Device Groove Etching Protection
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Solution Overview
Problem
Existing micro switching devices face challenges in achieving low insertion loss due to difficulties in forming thick contact electrodes with low resistance, as thicker electrodes can lead to surface bumpy issues and potential damage during the manufacturing process, making it hard to achieve both low insertion loss and adequate isolation characteristics.
Innovation Solution
A method involving the formation of a groove along the piezoelectric drive and the use of an etchant-resistant protective film to slow down the etchant's approach to sensitive regions, ensuring protection during the wet etching process, allowing for thicker fixed contact electrodes to be formed while maintaining the integrity of the piezoelectric drive.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of energy
If thicker fixed contact electrodes are formed to reduce insertion loss, then electrical resistance decreases, but manufacturing precision deteriorates due to surface bumpy issues and potential damage during the manufacturing process
Solution Approach 1:
A protective film is formed over the piezoelectric drive before the wet etching process to prevent etchant erosion. This preliminary protective action enables the subsequent formation of thicker contact electrodes without damaging the piezoelectric drive, resolving the contradiction between reducing insertion loss and maintaining manufacturing precision
Solution Approach 2:
A protective film acts as an intermediary layer between the wet etchant and the piezoelectric drive. This intermediary protects the piezoelectric drive from etchant damage while allowing the formation of thicker contact electrodes, thereby enabling low insertion loss without sacrificing manufacturing precision
2Ease of operation
If wet etching is performed to release the movable portion, then the movable portion becomes functional, but the piezoelectric drive is eroded by the etchant
Solution Approach 1:
A protective film is introduced as an intermediary layer between the wet etchant and the piezoelectric drive. This film allows the wet etching process to proceed for releasing the movable portion while preventing etchant erosion of the piezoelectric drive, thereby maintaining reliability
Solution Approach 2:
The protective film is selectively applied only to regions requiring protection (the piezoelectric drive), while leaving other regions exposed for proper etching. This local application enables the movable portion to be released while protecting the piezoelectric drive from damage
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables the formation of thick, low-resistance fixed contact electrodes, reducing insertion loss and improving isolation characteristics by preventing etchant erosion of the piezoelectric drive, thus enhancing the performance of micro switching devices.
Implementation Method 1
forming an etchant-resistant protective film on the object structure, covering the protection target and the groove, with part of the film extending into the groove
Implementation Method 2
when a predetermined electric potential is applied to the drive electrode 55, an electrostatic pull is generated between the drive electrodes 55, 56
Implementation Method 3
the movable portion 52 is deformed elastically until the movable contact 53 makes contact with the fixed contact electrodes 54
Data Source
AI summary
A micro movable device includes a base substrate, a fixed portion bonded to the base substrate, a movable portion having a fixed end connected to the fixed portion and extending along the base substrate, and a piezoelectric drive provided on the movable portion and the fixed portion on a side opposite to the base substrate. The piezoelectric drive has a laminate structure provided by a first electrode film contacting the movable portion and the fixed portion, a second electrode film and a piezoelectric film between the first and the second electrode films. At least one of the movable portion and the fixed portion is provided with a groove extending along the piezoelectric drive.