Micro-nano Device for Lidar Beam Steering

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Solution Overview

Problem

Current Lidar systems are large in size, easily affected by external environments, and unable to meet the requirements of fast decision time, high accuracy, and 360° real-time working range necessary for safe automatic vehicle applications, especially under varying weather and sunlight conditions.

Innovation Solution

A micro-nano device with a micro-nano structural cell comprising a substrate, electrode layers, a tunable dielectric layer, and an absorbing layer, where the absorption resonance frequency of the tunable dielectric layer is changed by an electric field to control light transmission and direction, enabling dynamic beam pointing and high imaging quality.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If traditional MEMS-based Lidar systems are used, then beam steering capability is achieved, but the system becomes large in size and easily affected by external environment

Engineering Contradiction:
Improvebeam steering capabilityVSAvoidsystem size
Core Design Contradiction:
Adaptability or versatilityVSVolume of moving object

Solution Approach 1:

The patent replaces traditional mechanical MEMS structures with a planar photonic crystal-based optical system. The beam steering is achieved through optical means (modulating refractive index and absorption) rather than mechanical movement, thereby eliminating the bulky mechanical components while maintaining beam steering capability.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the physical parameters of the photonic crystal structure by modulating the refractive index through electrical field application and controlling light absorption. This allows dynamic beam steering without mechanical movement, achieving compact size while maintaining adaptability.

Inventive Principle:
Principle #35Parameter changes

2Adaptability or versatility

If traditional MEMS-based Lidar systems are used, then beam steering is achieved, but the system is easily affected by external environment

Engineering Contradiction:
Improvebeam steering capabilityVSAvoidenvironmental stability
Core Design Contradiction:
Adaptability or versatilityVSReliability

Solution Approach 1:

By replacing mechanical MEMS components with a solid-state photonic crystal system, the patent eliminates mechanical parts that are susceptible to environmental effects such as dust, moisture, and temperature variations, thereby improving reliability while maintaining beam steering functionality.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The photonic crystal structure operates as a closed optical system that is not exposed to external environmental factors. The optical path is contained within the structured medium, creating an effective 'inert environment' that protects the system from external disturbances.

Inventive Principle:
Principle #39Inert atmosphere (Inert environment)

3Volume of moving object

If compact chip-level sensor is manufactured, then size and cost are reduced, but measurement accuracy and real-time performance must be maintained

Engineering Contradiction:
Improvesensor sizeVSAvoidmeasurement accuracy
Core Design Contradiction:
Volume of moving objectVSMeasurement precision

Solution Approach 1:

The patent achieves high measurement accuracy in a compact format by precisely controlling optical parameters (refractive index, absorption coefficient) within the photonic crystal structure. The beam steering angle and positioning accuracy are determined by these optical parameters rather than mechanical dimensions, allowing miniaturization without sacrificing precision.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The substitution of mechanical positioning with optical parameter modulation enables compact integration while maintaining precision. The photonic crystal's optical properties can be precisely controlled at the micro-scale, achieving accurate beam steering in a chip-level device.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

4Loss of time

If fast decision time is achieved, then safety for automatic vehicles is improved, but system complexity and real-time processing requirements increase

Engineering Contradiction:
Improvedecision timeVSAvoidsystem complexity
Core Design Contradiction:
Loss of timeVSDevice complexity

Solution Approach 1:

The patent replaces complex mechanical control systems with a simpler optical modulation approach. By directly modulating the refractive index and absorption of the photonic crystal through electrical signals, the system achieves fast response time without the complexity of mechanical actuation, positioning, and control mechanisms.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The system achieves fast decision time by directly changing optical parameters in response to electrical signals. The photonic crystal's refractive index and absorption can be rapidly modulated, enabling real-time beam steering without the inertia and delay associated with mechanical systems.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution provides a compact and affordable chip-level sensor capable of achieving high imaging quality and stable operation under different environmental conditions, addressing the limitations of existing Lidar systems by enabling precise and real-time beam steering.

Implementation Method 1

an absorption resonance frequency of the tunable dielectric layer is changed under a drive of an electric field between the first electrodes and the second electrodes to change a transmission intensity of light in the micro-nano structural cell

Methodology Applied
Scientific EffectAbsorption resonance: Absorption (EM radiation)

Implementation Method 2

the absorbing layer selectively absorbs light in different regions within the plurality of the light control regions to change a direction of light passing through the micro-nano structural cell

Methodology Applied
Scientific EffectLight absorption: Absorption (EM radiation)

Data Source

PatentUS12253769B2Micro-nano device, manufacturing method, and display device
Publication Date: 2025.03.18 BEIJING BOE TECH DEV CO LTD
  • US12253769B2 patent drawing
  • US12253769B2 patent drawing
  • US12253769B2 patent drawing

AI summary

The present disclosure relates to the field of micro-nano devices, and discloses a micro-nano device, a manufacturing method, and a display device. The micro-nano device includes a micro-nano structural cell; wherein the micro-nano structural cell includes a substrate provided with a light incident surface and a light emergent surface which are oppositely disposed; a first electrode layer, a second electrode layer, a tunable dielectric layer and an absorbing layer.