Micro-optical Diffraction Grating with Sinusoidal Surface Structure
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Solution Overview
Problem
Current methods for manufacturing micro-optical diffraction gratings are costly and inefficient due to the need for high mechanical pressure, limited precision, and restricted spectral resolution, with existing processes like casting and holographic techniques being cumbersome and requiring specialized equipment.
Innovation Solution
A micro-optical diffraction grating with a sinusoidal surface structure formed by linear structural elements on a substrate, where a deformable material layer is applied and shaped using energy application methods like radiation or thermal treatment to create a uniform wave-shaped surface, allowing for high-volume, cost-effective production and precise control over the grating's geometry and reflectivity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If casting process from master is used, then manufacturing precision is improved, but device complexity and production cost increase
Solution Approach 1:
The patent replaces the mechanical casting process with a direct laser writing process that uses optical fields to directly write the grating pattern onto the substrate, eliminating the need for mechanical masters and hardening plastics
Solution Approach 2:
The patent extracts and removes the master creation step and hardening plastic step from the manufacturing process, using laser direct writing to create the grating pattern directly on the substrate without requiring a separate master
2Manufacturing precision
If high mechanical pressure is applied for grating formation, then manufacturing precision is improved, but substrate integrity deteriorates
Solution Approach 1:
The patent replaces mechanical pressure-based forming with a laser-based optical field process that writes the grating pattern without applying significant mechanical pressure to the substrate
Solution Approach 2:
The patent changes the forming mechanism from mechanical pressure to optical field interaction, using laser parameters (wavelength, intensity, scanning speed) to control the grating formation instead of mechanical pressure parameters
3Measurement precision
If holographic processes are used, then spectral resolution is improved, but device complexity and production cost increase
Solution Approach 1:
The patent extracts and removes the complex holographic interference apparatus from the manufacturing process, using direct laser writing to create the grating pattern without requiring interference patterns
Solution Approach 2:
The patent replaces the optical interference-based holographic process with a direct laser writing process that uses controlled laser scanning to write the grating pattern directly
4Measurement precision
If gray-scale lithography is used, then spectral resolution is improved, but productivity decreases
Solution Approach 1:
The patent uses continuous laser scanning to write the grating pattern in a single continuous process, eliminating the multiple exposure and development steps required by gray-scale lithography
Solution Approach 2:
The patent removes the photosensitive layer exposure and development steps from the process, writing the grating pattern directly into the substrate material using laser ablation or melting
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables the production of diffraction gratings with improved spectral resolution and reduced production costs, allowing for the manufacture of high-quality micro-optical diffraction gratings suitable for various electromagnetic radiation ranges, including extreme ultraviolet to infrared, with enhanced precision and scalability.
Implementation Method 1
a deformable material layer is applied and shaped using energy application methods like radiation or thermal treatment to create a uniform wave-shaped surface
Implementation Method 2
The deformation of the at least one layer is substantially maintained after the end of the application of energy. A much more regularized surface topology can thereby be obtained
Data Source
AI summary
The invention relates to electromagnetic radiation microoptical diffraction gratings and to a method suitable for the manufacture thereof. The diffraction gratings in accordance with the invention can be used as microspectrometers in the form of scanning microgratings. The microgratings are provided with a surface structure and are able to be manufactured cost effectively and in high volumes. The surface structure is formed at a surface of a substrate and is formed from linear structural elements arranged substantially equidistantly and aligned substantially parallel to one another. At least part of the surface of the substrate and of the structural elements is coated with at least one further layer which forms a uniform sinusoidal surface contoured in a wave-shape (sinusoidal) manner and having alternating arranged wave peaks and wave troughs. A reflective layer can additionally be applied to increase the intensity of reflected radiation.