Micro-Optical Filter with Dielectric Layer for Wavelength Selection

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Solution Overview

Problem

Current spectrometers face challenges in economically manufacturing precise, energy-selective optical functional elements with high precision, particularly in achieving minimal hindrance for the radiation of interest, which limits their widespread application in fields like medical technology, agriculture, and industry.

Innovation Solution

A micro-optical filter apparatus is designed with a pinhole diaphragm and an electrically insulating, optically transparent dielectric layer, where the pinhole diaphragm has resonance damping characteristics and the dielectric layer's thickness is less than half the lower limit wavelength, allowing high-frequent radiation to propagate differently and minimizing disturbances.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If pinhole diaphragms are manufactured using high-precision manufacturing processes on nm-scale, then manufacturing precision of aperture mask is improved, but manufacturing cost and complexity increase

Engineering Contradiction:
Improveaperture mask precisionVSAvoidmanufacturing process complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent extracts the wavelength-selective function from the aperture mask edges and transfers it to a separate optical filter layer. The optical filter is deposited as a distinct layer structure on the aperture mask, allowing the aperture mask to be manufactured with standard precision while the optical filter provides the precise wavelength selection through its layer thickness and material properties.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent segments the wavelength-selective function into a separate optical filter component with multiple layers. Each layer has specific thickness and material properties that collectively provide the desired spectral filtering, separating the structural support function (aperture mask) from the optical filtering function.

Inventive Principle:
Principle #1Segmentation

2Manufacturing precision

If conventional optical filters are used, then wavelength selection is achieved, but radiation of interest is hindered

Engineering Contradiction:
Improvewavelength selection precisionVSAvoidradiation hindrance
Core Design Contradiction:
Manufacturing precisionVSObject-affected harmful factors

Solution Approach 1:

The patent applies local quality by creating spatially varying optical properties in the filter layers. The optical filter layers have different thicknesses in different regions, and the aperture mask has openings of different sizes, allowing different wavelength ranges to pass through different regions while minimizing overall radiation hindrance.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent uses composite material structures combining multiple dielectric layers with different refractive indices and thicknesses. This layered composite structure provides enhanced wavelength selectivity through constructive and destructive interference while maintaining high transmission for the desired wavelength range.

Inventive Principle:
Principle #40Composite materials

3Measurement precision

If spectrometers are manufactured with precise optical elements, then measurement precision is improved, but manufacturing cost increases

Engineering Contradiction:
Improvespectral detection precisionVSAvoidmanufacturing cost
Core Design Contradiction:
Measurement precisionVSEase of manufacture

Solution Approach 1:

The patent replaces mechanically complex high-precision aperture mask manufacturing with a more manufacturable approach using deposited optical filter layers. The optical filter layers provide the necessary wavelength selectivity through their material properties and thickness rather than requiring extremely precise mechanical aperture structures.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the approach from controlling geometric parameters (aperture size and position) to controlling material parameters (layer thickness, refractive index, and composition). This allows standard manufacturing techniques to achieve the required precision by controlling deposition parameters rather than requiring ultra-precise mechanical fabrication.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enables the micro-optical filter to selectively transmit electromagnetic radiation within a predefined wavelength range with minimal hindrance, enhancing the precision and cost-effectiveness of spectrometers, making them suitable for broad-scale real-time spectrometry applications.

Implementation Method 1

a pinhole diaphragm arranged above the carrier and made of a material substantially impermeable to the radiation of interest, the pinhole diaphragm having resonance damping characteristics

Methodology Applied
Scientific EffectResonance damping: Damping

Implementation Method 2

an electrically insulating and optically transparent dielectric layer formed on the carrier inside the radiation passage opening and extending, in a manner adjoining the radiation passage opening, between the carrier and at least one section below the pinhole diaphragm, wherein the dielectric layer has a thickness which is less than or equal to half a predefinable lower limit wavelength

Methodology Applied
Scientific EffectOptical interference: Interference

Data Source

PatentUS9958320B2Apparatus for selectively transmitting the spectrum of electromagnetic radiation within a predefined wavelength range
Publication Date: 2018.05.01 ELMOS SEMICON AG
  • US9958320B2 patent drawing
  • US9958320B2 patent drawing
  • US9958320B2 patent drawing

AI summary

The apparatus for selectively transmitting the spectrum of electromagnetic radiation within a predefined wavelength range is provided with a carrier (115), a pinhole diaphragm which is arranged above the carrier (115) and is made of a material that is substantially impermeable to the radiation of interest, wherein the pinhole diaphragm has at least one radiation passage opening with a size for allowing through radiation at a wavelength which is less than or equal to a predefinable upper limit wavelength, and an electrically insulating and optically transparent dielectric layer (103) which is formed on the carrier (115) inside the radiation passage opening and extends, in a manner adjoining the radiation passage opening, between the carrier (115) and at least one section below the pinhole diaphragm. The dielectric layer (103) has a thickness which is less than or equal to half a predefinable lower limit wavelength which is less than the upper limit wavelength.