Micro-position gap sensor assembly for fluid flow control
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Solution Overview
Problem
Developing devices with small-scale moving components that can reliably measure sub-millimeter or sub-micrometer displacements while maintaining a high signal-to-noise ratio and protecting sensing components from corrosive fluids, and addressing the slow responsiveness of mass flow control systems in fluid flow applications.
Innovation Solution
A micro-position gap sensor assembly featuring a structural housing with a flexible diaphragm, a shaft orthogonally attached to the diaphragm, and a parallel plate gap sensor with a non-contact sensor plate and a target plate, configured to provide high-resolution measurements and direct flow rate control without relying on feedback control methods.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If mass flow control systems adjust flow control valve position slowly and incrementally to minimize overshooting and undershooting, then measurement stability is improved, but system responsiveness deteriorates
Solution Approach 1:
The patent replaces traditional mechanical feedback control mechanisms with a non-contact capacitive sensing system. The parallel plate gap sensor directly measures valve position without mechanical contact, enabling instantaneous detection and control responses while eliminating the need for slow incremental adjustments.
Solution Approach 2:
The patent uses a non-contact capacitive sensor to create an electrical copy of the valve position information. The sensor plate detects changes in capacitance corresponding to valve position without physically contacting moving parts, providing immediate measurement feedback for rapid control adjustments.
2Measurement precision
If sensor systems are equipped to measure sub-millimeter or sub-micrometer displacements, then measurement precision is improved, but signal-to-noise ratio deteriorates
Solution Approach 1:
The patent introduces a non-contact capacitive sensing mechanism as an intermediary between the valve position and measurement system. The sensor plate detects position changes through electrical field interactions rather than direct mechanical contact, amplifying subtle displacement signals while filtering out mechanical noise and vibrations.
Solution Approach 2:
The patent measures position by detecting changes in capacitance parameters rather than direct mechanical displacement. This electrical parameter measurement approach provides higher sensitivity for sub-micrometer movements and better signal-to-noise ratio compared to traditional mechanical measurement methods.
3Reliability
If physical barriers such as non-permeable membranes are introduced to protect sensors from corrosive fluids, then component protection is improved, but measurement precision deteriorates
Solution Approach 1:
The patent uses the fluid itself as an intermediary medium for measurement. The capacitive sensor measures valve position through the fluid without requiring physical barriers, eliminating the need for protective membranes that would compromise measurement accuracy while maintaining component protection through proper sensor placement and sealing.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate and instantaneous control of fluid flow rates by measuring valve positions with high precision, providing a high signal-to-noise ratio and protecting internal components from fluid exposure, thus overcoming the limitations of traditional mass flow control systems.
Implementation Method 1
a parallel plate gap sensor configured such that displacement of one of the target plate or the non-contact sensor plate caused by movement of the shaft, changes a distance between the target plate and the non-contact sensor plate
Data Source
AI summary
A micro-position gap sensor assembly including a structural housing and a flexible diaphragm fixedly attached forming a barrier against fluid ingress. The structural housing includes a shaft orthogonally attached to the flexible diaphragm, a first retainer including one or more standoffs, a second retainer, and a parallel plate gap sensor. The parallel gap plate sensor includes a non-contact sensor plate biased against a portion of the first retainer defining a plane of the non-contact sensor plate and receiving a biasing force in opposition of the first retainer from the second retainer, a target plate comprised of a conductive paramagnetic material. The parallel plate gap sensor is configured such that displacement of one of the target plate or the non-contact sensor plate changes a distance between the target plate and the non-contact sensor plate.