Micro-posts with Oblique Bases for Uniform Height and Density
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Solution Overview
Problem
Conventional methods for fabricating micro-posts on substrates face challenges with height non-uniformity and component density, as dry etching results in significant height variations and consumes excessive substrate area, while wet etching produces truncated structures.
Innovation Solution
A method involving a dry etch to form a post portion in a trench on a substrate, followed by a wet etch to create a base portion with oblique side surfaces, allowing for uniform micro-post height and reduced base width, enabling improved yield and component density.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If dry etching is used to form micro-posts, then component density is improved, but height uniformity deteriorates with significant height variations
Solution Approach 1:
The micro-post structure is segmented into two distinct portions: a post portion formed by dry etching and a base portion formed by wet etching. This segmentation allows each portion to be optimized by different etching methods, with the base portion providing a larger footprint for higher component density and the post portion maintaining vertical walls for better height uniformity.
Solution Approach 2:
Different etching qualities are applied to different regions of the micro-post structure. The base portion uses wet etching to create oblique side surfaces with larger lateral dimensions, while the post portion uses dry etching to create vertical walls with consistent height. This local quality differentiation resolves the contradiction between component density and height uniformity.
2Manufacturing precision
If wet etching is used to form micro-posts, then height uniformity is improved, but the structure becomes truncated with reduced component density
Solution Approach 1:
The micro-post is divided into a base portion and a post portion, with the base portion formed by wet etching to provide height uniformity and the post portion formed by dry etching to maximize vertical height and component density. This segmentation allows both benefits to coexist in different regions.
Solution Approach 2:
The base portion is formed first using wet etching to establish a uniform height foundation with oblique side surfaces. Then the post portion is formed on top using dry etching to achieve maximum height and density. This preliminary action sequence ensures both height uniformity and component density are optimized.
3Quantity of substance
If conventional dry etching is used, then component density is increased, but substrate area consumption increases
Solution Approach 1:
The base portion uses wet etching to create oblique side surfaces that converge downward, maximizing the use of substrate area and reducing the lateral footprint of the base. This local quality differentiation allows higher component density without proportionally increasing substrate area consumption.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The approach achieves micro-posts with heights within 5% uniformity and a higher component density, enhancing overall product quality and yield by using thicker substrates without the drawbacks of conventional processes.
Implementation Method 1
performing a dry etch to form a post portion of a micro-post in a trench on a surface of a substrate
Implementation Method 2
performing a wet etch to remove a layer from said substrate such that the post portion is located on a base portion
Data Source
AI summary
As discussed herein, there is presented an apparatus comprising micro-posts. The apparatus includes a substrate having a planar surface, a plurality of micro-posts located on the planar surface, wherein each micro-post has a base portion on the planar surface and a post portion located on a top surface of the corresponding base portion, and wherein side surfaces of the base portions intersect the planar surface at oblique angles.