Micro-prism array for maskless exposure light concentration
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Solution Overview
Problem
Conventional maskless exposure apparatuses face challenges in maintaining precise image formation due to light diffusion and alignment errors, leading to reduced exposure performance and loss of light quantity, especially when using micro-lens arrays.
Innovation Solution
The use of a micro-prism array or micro-mirror array with wide incident and narrow exit portions, designed to concentrate light by refraction or reflection, preventing light diffusion and enhancing exposure performance by minimizing light loss.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a conventional micro-lens array is used for light concentration, then light transmission is achieved, but light diffusion occurs affecting neighboring pixels and reducing exposure performance
Solution Approach 1:
The patent divides the optical component into multiple micro-prisms arranged in an array, where each micro-prism independently processes light from corresponding pixels. This segmentation prevents light diffusion between adjacent pixels while maintaining efficient light concentration, directly resolving the contradiction between exposure performance and pattern accuracy
Solution Approach 2:
Each micro-prism is designed with specific local geometric properties (wide incident portion and narrow output portion) optimized for its specific function of concentrating light from individual pixels. This local optimization ensures that each pixel's light is precisely directed without affecting neighboring pixels, improving both exposure performance and pattern accuracy
2Quantity of substance
If light is concentrated through a narrow output portion, then light quantity is increased, but light diffusion to neighboring pixels occurs
Solution Approach 1:
By segmenting the optical system into discrete micro-prisms, each with its own light concentration function, the patent ensures that concentrated light from one pixel cannot diffuse to neighboring pixels. This segmentation maintains high light quantity while eliminating harmful light diffusion
Solution Approach 2:
The micro-prism array acts as an intermediary optical element between the pixel array and the exposure surface. It mediates the light transmission process by concentrating light through refraction while its geometric structure inherently prevents cross-pixel diffusion, thus increasing light quantity without the harmful effect of light diffusion
3Productivity
If a wide incident portion is used for light collection, then light transmission efficiency is improved, but numerical aperture increases causing image quality degradation
Solution Approach 1:
Each micro-prism is designed with locally optimized geometry where the wide incident portion efficiently collects light while the narrow output portion controls the exit beam. This local geometric optimization allows high light transmission efficiency without degrading image quality, as each micro-prism maintains precise optical control
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively concentrates light without loss, improving exposure performance by ensuring that light is transmitted to the intended area without influencing neighboring pixels, thereby achieving nearly 100% light utilization and enhanced pattern precision.
Implementation Method 1
designed to concentrate light by refraction or reflection
Implementation Method 2
designed to concentrate light by refraction or reflection
Data Source
AI summary
Disclosed relates to an optical component for a maskless exposure apparatus, and more particularly, to a micro-prism array or a micro-mirror array which is an optical component capable of screening diffused light such that the image of a pixel of a digital micro-mirror display (DMD) formed by a first image-forming lens in the maskless exposure apparatus has no influence on the image of a neighboring pixel and of totally reflecting the light after reflection or diffraction at the same time, thus improving exposure performance by using the quantity of light being transmitted without a loss and increasing numerical apertures (NAs) at the same time.