Micro-sample Orientation via Particle Beam Hinge Shaping
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Solution Overview
Problem
Existing methods for changing the spatial orientation of micro-samples in microscope systems, such as TEM lamellas, often require expensive and complex manipulation tools, risking damage or loss during affixing and releasing procedures, and lack efficient contactless methods for altering sample alignment.
Innovation Solution
A method using a particle beam-induced shaping of a hinge element adjacent to the micro-sample, allowing for contactless alteration of the sample's spatial orientation by producing a bending edge, which provides an additional degree of freedom for movement and alignment adjustment within the microscope system.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If micromanipulators or microgrippers are used to hold and manipulate the TEM lamella, then the lamella can be extracted and repositioned, but the risk of damaging or losing the lamella increases and expensive specialized tools are required
Solution Approach 1:
The patent replaces mechanical manipulation tools (micromanipulators, microgrippers) with a particle beam-induced shaping method. The focused ion beam creates a bending edge in the hinge element, which mechanically folds the lamella into the desired orientation without requiring physical grasping or manipulation, thereby eliminating the risk of mechanical damage from specialized tools
Solution Approach 2:
The patent introduces a hinge element as an intermediary component between the lamella and the holding device. This hinge element acts as a mediator that can be shaped by the particle beam to create the desired folding motion, allowing the lamella to be repositioned without direct mechanical contact or manipulation by expensive specialized tools
2Adaptability or versatility
If specifically formed sample stages or sample holders are used to alter sample orientation, then additional degrees of freedom of movement are provided, but device complexity and cost increase
Solution Approach 1:
The patent replaces complex mechanical orientation control systems (specifically formed sample stages, flip stages, and correspondingly oriented sample grids) with a particle beam-induced shaping method. The focused ion beam creates a bending edge in the hinge element, providing the necessary degree of freedom for orientation change without requiring complex mechanical stages or holders
Solution Approach 2:
The patent extracts the orientation control function from complex mechanical systems and implements it through a simplified approach using particle beam-induced shaping of a hinge element. This removes the need for expensive and complex specially formed sample stages while achieving the same functional result
3Adaptability or versatility
If multiple affixing and releasing procedures are performed to change lamella orientation, then the spatial orientation can be altered, but the risk of damage or loss increases and time is consumed
Solution Approach 1:
The patent performs preliminary action by creating the bending edge in the hinge element using particle beam-induced shaping before the lamella needs to be repositioned. This preparation allows for rapid orientation change without requiring multiple sequential affixing and releasing procedures, saving time and reducing the risk of damage during repeated manipulation
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient and damage-free alteration of micro-sample orientation, facilitating further processing or analysis steps like electron beam imaging, thinning, and polishing, without the need for expensive tools, by utilizing a focused ion beam to shape the hinge element and change the sample's position relative to the optical axis.
Implementation Method 1
producing a bending edge in the hinge element by way of irradiation with a beam of charged particles
Data Source
AI summary
A method is carried out with the aid of a particle beam microscope which includes a particle beam column for producing a beam of charged particles, the particle beam column having an optical axis. Furthermore, the particle beam microscope includes a holding device for holding the extracted micro-sample. The method includes holding the extracted micro-sample and an adjacent hinge element via the holding device. The micro-sample adopts a first spatial orientation relative to the optical axis. The method also includes producing a bending edge in the hinge element by way of irradiation with a beam of charged particles such that the adjacent micro-sample is moved in space and the spatial orientation of the micro-sample is altered. The method further includes holding the micro-sample in a second spatial orientation relative to the optical axis, wherein the second spatial orientation differs from the first spatial orientation.