Micro Shell Resonator Gyroscope Vacuum Packaging
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Solution Overview
Problem
The development of high-performance micro shell resonator gyroscopes is hindered by the high cost and low accuracy of three-dimensional MEMS technology, which limits the miniaturization and vacuum packaging of shell resonator gyroscopes, resulting in suboptimal performance due to low vacuum degrees and air damping issues.
Innovation Solution
A micro three-dimensional shell resonator gyroscope is designed with a composite structure substrate that embeds non-planar electrodes and a conductive structure, allowing for perpendicular electrical lead-out and vacuum packaging, using materials like amorphous glass and iron-nickel alloys to enhance symmetry and reduce thermal expansion, and incorporating a getter for improved vacuum integrity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If three-dimensional MEMS technology is used for miniaturization, then device size is reduced, but manufacturing precision and vacuum quality deteriorate
Solution Approach 1:
The device is divided into separate components: the shell resonator is fabricated independently using glass blowing, and the electrode assembly is fabricated separately using MEMS technology. This segmentation allows each component to be optimized for its specific fabrication method, with the glass resonator providing high vacuum quality and the MEMS electrode assembly providing precise electrical connections.
Solution Approach 2:
The invention uses a composite structure combining glass (for the shell resonator) and silicon (for the electrode assembly and substrate). Glass provides excellent vacuum sealing and resonator performance, while silicon provides precise MEMS fabrication capabilities for the electrode structure. This composite approach resolves the contradiction between miniaturization and vacuum quality.
2Ease of manufacture
If electrode and resonator are independently fabricated and assembled, then manufacturing flexibility is improved, but assembly precision deteriorates due to inconsistent intervals and areas
Solution Approach 1:
A support structure with pre-defined electrode mounting positions serves as an intermediary component between the independently fabricated resonator and electrode assembly. This support structure includes precisely positioned through-holes and mounting features that ensure consistent intervals and areas during assembly, resolving the precision issues while maintaining manufacturing flexibility.
Solution Approach 2:
The support structure is prepared in advance with pre-defined electrode mounting positions, through-holes, and alignment features before the final assembly step. This preliminary preparation of the support structure ensures that when the independently fabricated resonator and electrode assembly are combined, the intervals and areas are consistently maintained.
3Reliability
If vacuum packaging is implemented, then operational performance is improved, but device complexity and manufacturing difficulty increase
Solution Approach 1:
The support structure serves multiple functions simultaneously: it provides mechanical support for the resonator, holds the electrodes in precise positions, enables electrical connections through integrated through-holes, and facilitates vacuum sealing. By merging these functions into a single component, the overall device complexity is reduced while maintaining high operational performance.
Solution Approach 2:
The support structure is designed as a multi-functional component that performs structural support, electrical connection, and vacuum sealing functions. This universal design reduces the total number of separate components needed, simplifying the manufacturing process while ensuring high vacuum quality and operational performance.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables batch fabrication of highly symmetrical micro shell resonators with increased capacitance and reduced thermal-mechanical noise, improving the Q value and operational frequency stability, facilitating industrial production and high-performance micro shell resonator gyroscope development.
Implementation Method 1
The non-planar electrodes are embedded into the composite structure substrate, and include conventional electrodes, the conventional electrodes including an even number of forcer electrodes and an even number of pick-off electrodes
Implementation Method 2
the single-ended stem of the micro shell resonator is electrically connected with the conductive structure in the composite structure substrate by means of a conductive layer
Implementation Method 3
the packaging shell cover and the composite structure substrate into which the non-planar electrodes and the conductive structure are embedded are vacuum-packaged
Data Source
AI summary
The present invention discloses a micro three-dimensional shell resonator gyroscope, a method for fabricating a micro shell resonator, a method for fabricating a composite structure substrate, and a method for fabricating a micro three-dimensional shell resonator gyroscope. A micro three-dimensional shell resonator gyroscope includes a packaging shell cover, a micro shell resonator, and a composite structure substrate. The micro shell resonator includes a shell, a single-ended column, and a flange. The composite structure substrate includes a non-planar electrode, a conductive structure, an electrical isolation part, and a main body part. The non-planar electrode includes a driving electrode, a detection circuit, an annular exciting electrode, and an isolation electrode.