Micro Spectrum Chip with Shaped Gratings for Precise Miniaturization

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Solution Overview

Problem

Traditional spectrometers face limitations in miniaturization due to large beam-splitting elements and limited broad-spectrum modulation functions of regular-shape micro-nano structure arrays, leading to reduced precision and size constraints.

Innovation Solution

A micro spectrum chip utilizing micro-nano structure units with different shapes and configurations, including a CIS wafer and optical modulation layer, where each unit has multiple arrays with varying shapes and periods, allowing for dynamic adjustment and integration with a signal processing circuit, enhancing spectral resolution and reducing device size.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If regular-shape micro-nano structure arrays are used for spectral modulation, then device size can be reduced, but broad-spectrum modulation function and spectrum restoration precision are limited

Engineering Contradiction:
Improvedevice sizeVSAvoidspectrum restoration precision
Core Design Contradiction:
Volume of moving objectVSMeasurement precision

Solution Approach 1:

The patent introduces micro-nano structure units with asymmetric and irregular shapes instead of traditional regular repeating patterns. Each unit contains micro-nano structures with varying shapes, sizes, and orientations, which break the symmetry limitation and enable richer spectral modulation characteristics while maintaining compact device dimensions

Inventive Principle:
Principle #4Asymmetry

Solution Approach 2:

The patent implements local quality variation by designing different micro-nano structure units with distinct geometric characteristics at different locations. Each unit has locally optimized shape parameters, densities, and configurations that provide spatially varying spectral responses, thereby enhancing overall spectrum restoration precision without increasing device volume

Inventive Principle:
Principle #3Local quality

2Measurement precision

If beam-splitting elements are used for spatial separation of wavelengths, then spectral detection can be achieved, but device size increases

Engineering Contradiction:
Improvespectral detection capabilityVSAvoiddevice size
Core Design Contradiction:
Measurement precisionVSVolume of moving object

Solution Approach 1:

The patent replaces traditional mechanical beam-splitting elements with a micro-nano structure array that uses optical interference and diffraction effects at the micro-nano scale. This substitution eliminates the need for large mechanical optical components while achieving wavelength separation through carefully designed micro-nano structure geometries that modulate incident light across different spectral bands

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent transitions from traditional planar beam-splitting to three-dimensional micro-nano structure configurations. By utilizing vertical stacking, varying depths, and multi-layer arrangements of micro-nano structures, the system achieves spectral separation in the vertical dimension and through spatial frequency modulation, thereby compacting the optical path and reducing overall device volume

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The chip achieves high-precision spectrum restoration with reduced size, promoting miniaturization and stability, suitable for applications in small platforms like small satellites and UAVs, while minimizing sensor distance and lowering packaging costs.

Implementation Method 1

the incident light is modulated by a micro-nano structure array with units of regular, repeating shapes

Methodology Applied
Scientific EffectDiffraction: Diffraction

Implementation Method 2

the incident light is modulated by a micro-nano structure array with units of regular, repeating shapes

Methodology Applied
Scientific EffectInterference: Interference

Data Source

PatentUS12414393B2Micro spectrum chip based on units of different shapes
Publication Date: 2025.09.09 TSINGHUA UNIVERSITY
  • US12414393B2 patent drawing
  • US12414393B2 patent drawing
  • US12414393B2 patent drawing

AI summary

A micro spectrum chip based on units of different shapes. The micro spectrum chip includes a CIS wafer and an optical modulation layer. The optical modulation layer includes several micro-nano structure units arranged on the surface of a photosensitive area of the CIS wafer. Each micro-nano structure unit includes a plurality of micro-nano structure arrays, and in each micro-nano structure unit, different micro-nano structure arrays are two-dimensional gratings composed of internal units of different shapes. In each micro-nano structure unit in this scheme, different micro-nano structure arrays have different shapes of internal units, and each group of micro-nano structure arrays have different modulation effects on lights with different wavelengths. The degree of freedom of “shape” is fully utilized to obtain a rich modulation effect on the incident light. A two-dimensional grating structure based on internal units of different shapes is utilized.