Micro-structural Fluid Ejector for Precision Metal Line Printing

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Solution Overview

Problem

Conventional ink jet printing processes are not optimal for forming patterns with line widths in the range of 1 μm to 10 μm, which is a challenge for producing metal lines efficiently and productively, especially considering the high cost of photolithography and etch equipment.

Innovation Solution

A fluid printing apparatus with a micro-structural fluid ejector that includes an output portion with an exit orifice diameter between 0.1 μm and 5 μm and a surface roughness of less than 0.1 μm, combined with a pneumatic system and print head positioning system, which maintains a precise vertical distance and applies pressure to ensure accurate and productive line formation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of substance

If conventional ink jet printing is used, then material waste is reduced compared to photolithography, but manufacturing precision for line widths of 1-10 μm deteriorates

Engineering Contradiction:
Improvematerial wasteVSAvoidline width precision
Core Design Contradiction:
Loss of substanceVSManufacturing precision

Solution Approach 1:

The patent changes the physical parameters of the fluid ejector system by using a micro-structural fluid ejector with a tapered portion and controlling fluid pressure (−50,000 Pa to 1,000,000 Pa) and vertical distance (0 μm to 5 μm), enabling precise line width control from 1-10 μm while maintaining material efficiency

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent introduces dynamic control mechanisms including a print head positioning system that adjusts vertical distance in real-time and a pneumatic system that dynamically regulates fluid pressure, allowing the system to adapt to different printing conditions and achieve consistent precision across varying line widths

Inventive Principle:
Principle #15Dynamics

2Manufacturing precision

If photolithography and etch are used, then manufacturing precision for metal lines is improved, but device complexity and cost increase

Engineering Contradiction:
Improvemetal line precisionVSAvoidequipment complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent extracts and eliminates the need for complex photolithography and etch equipment by using a standalone fluid printing system that directly deposits metal lines through a micro-structural fluid ejector, simplifying the manufacturing process while maintaining precision for line widths of 1-10 μm

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent replaces the complex mechanical and chemical systems of photolithography and etch with a controlled fluid deposition system using pneumatic pressure and precise positioning, substituting multi-step photochemical processes with a more direct mechanical-fluid hybrid approach

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Device complexity

If conventional ink jet printing is used, then device complexity is reduced, but manufacturing precision for line widths of 1-10 μm deteriorates

Engineering Contradiction:
Improveprinting system complexityVSAvoidline width precision
Core Design Contradiction:
Device complexityVSManufacturing precision

Solution Approach 1:

The patent segments the printing system into distinct functional modules: a micro-structural fluid ejector with tapered portion for precision control, a pneumatic system for pressure regulation, and a print head positioning system for spatial control, allowing each component to be optimized independently while maintaining overall system simplicity

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The apparatus enables the formation of precise lines with line widths greater than the output inner diameter by a factor of 1.0 to 20.0, achieving higher productivity and reducing material waste, particularly suitable for high-cost materials like quantum dots.

Implementation Method 1

the pneumatic system applies pressure to the fluid in the micro-structural fluid ejector in the range of −50,000 Pa to 1,000,000 Pa

Methodology Applied
Scientific EffectPressure: Pressure Increase

Implementation Method 2

The print head includes a micro-structural fluid ejector, which consists of an output portion, an elongate input portion, and a tapering portion between the output portion and the elongate input portion

Methodology Applied
Scientific EffectCapillary action: Capillary Action

Data Source

PatentUS11673409B2Fluid printing apparatus
Publication Date: 2023.06.13 XTPL SA
  • US11673409B2 patent drawing
  • US11673409B2 patent drawing
  • US11673409B2 patent drawing

AI summary

Fluid printing apparatus including substrate, print head, pneumatic system, and print head positioning system. The print head ejects fluid in a continuous stream with a micro-structural fluid ejector consisting of output, elongate input, and tapering portions between the output and elongate input portions. The output portion consists of an exit orifice of an inner diameter ranging between 0.1 μm and 5 μm and an end face having a surface roughness of less than 0.1 μm. The print head is positioned above the substrate with the output portion of the micro-structural fluid ejector pointing downward. During printing, the print head positioning system maintains a vertical distance between the end face and the printable surface of the substrate within a range of 0 μm to 5 μm, and the pneumatic system applies pressure to the fluid in the micro-structural fluid ejector in the range of −50,000 Pa to 1,000,000 Pa.