Micro-vibrator Support Structure Using Adhesive Recess Mounting
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Solution Overview
Problem
The challenge is to develop a support structure for micro-vibrators in inertial sensors that minimizes damage during mounting on substrates, particularly for highly sensitive gyro sensors requiring precise handling to maintain high Q values and sensitivity.
Innovation Solution
A support structure comprising a micro-vibrating body with a curved surface and a recess, and a support member with a rod and adhesive member, where the adhesive member is adhered to the internal bottom surface of the recess, allowing for secure connection without direct contact, enabling safe transportation and mounting while preventing electrode film peeling.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If direct handling of the micro-vibrating body is performed during mounting, then the mounting process is simple, but the micro-vibrating body is damaged and electrode film peeling occurs
Solution Approach 1:
A support member with a rod and adhesive member is introduced as an intermediary tool. The adhesive member adheres to the connecting surface (internal bottom surface of the recess) of the micro-vibrating body, allowing the support member to hold and transport the micro-vibrating body without direct contact. This prevents damage and electrode film peeling while maintaining ease of mounting operations.
2Device complexity
If the micro-vibrating body is directly mounted on the substrate, then the device structure is simple, but the vibration characteristics deteriorate due to damage
Solution Approach 1:
The support member serves as a protective intermediary during the mounting process. By adhering to the connecting surface of the micro-vibrating body, it enables precise positioning and mounting while preventing direct contact that would cause damage. This maintains vibration characteristics without significantly increasing device complexity.
3Reliability
If the micro-vibrating body is handled without support structure, then the Q value decreases due to damage, but the handling process becomes more complex with support members
Solution Approach 1:
The support member with rod and adhesive member provides a simple yet effective intermediary structure. The adhesive member bonds to the connecting surface of the micro-vibrating body, enabling safe handling and transport. This prevents damage that would reduce Q value and sensitivity, while the support structure itself remains relatively simple in design.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively suppresses damage to the micro-vibrating body and maintains vibration characteristics, enabling the production of highly reliable and sensitive inertial sensors by allowing for the formation of a conductive layer and secure mounting without direct handling of the micro-vibrator.
Implementation Method 1
a support member having a rod and an adhesive member arranged at a tip end of the rod. The support member is adhered on a connecting surface of the recess through the adhesive member.
Data Source
AI summary
A support structure for a micro-vibrator includes: a micro-vibrating body having a curved surface portion and a recess recessed from the curved surface portion; and a support member having a rod and an adhesive member arranged at a tip end of the rod. The support member is adhered on a connecting surface of the recess through the adhesive member. The connecting surface of the recess is an internal bottom surface of the recess.