Curved Micro Vibrator Mounting with Guard Electrode Noise Shielding
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Solution Overview
Problem
Existing micro vibrator mounting structures suffer from noise interference due to electrode surfaces on the mounting substrate that are not directly facing the micro vibrator, affecting the accuracy of electrostatic capacitance detection.
Innovation Solution
A mounting structure with a micro vibrator featuring a three-dimensional curved surface and a guard electrode on the mounting substrate that shields electrical interference from non-facing electrode surfaces, reducing noise and improving detection accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If electrode portions are arranged to surround the micro vibrator on the mounting substrate, then the electrostatic capacitance detection capability is improved, but noise interference from non-facing electrode surfaces increases
Solution Approach 1:
A guard electrode is introduced as an intermediary element between the detection electrode and the micro vibrator. The guard electrode is positioned to face the curved surface portion of the micro vibrator and is electrically connected to the detection electrode, thereby shielding the detection electrode from electrical interference caused by surrounding electrode portions and reducing noise in capacitance measurements.
Solution Approach 2:
The electrode structure is segmented into multiple functional components: a detection electrode for measuring capacitance, a guard electrode for shielding interference, and surrounding electrode portions for structural support. This segmentation allows each component to perform its specific function optimally while minimizing mutual interference.
2Stability of the object's composition
If multiple electrode portions are arranged around the micro vibrator, then the structural support and positioning are improved, but electrical interference and noise increase
Solution Approach 1:
The guard electrode serves as an intermediary that electrically isolates the detection electrode from the surrounding electrode portions. By being electrically connected to the detection electrode and positioned between it and the surrounding electrodes, the guard electrode prevents electrical interference from affecting the detection electrode while allowing the surrounding electrodes to maintain structural stability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The guard electrode effectively reduces noise interference, enhancing the detection accuracy of electrostatic capacitance and improving the sensitivity of the micro vibrator system.
Implementation Method 1
a guard electrode on the mounting substrate that shields electrical interference from non-facing electrode surfaces
Implementation Method 2
enhancing the detection accuracy of electrostatic capacitance
Data Source
AI summary
A mounting structure includes a micro vibrator and a mounting substrate. The micro vibrator includes a curved surface portion having an annular curved surface and a connecting portion extending from the curved surface portion toward an inner center position of the curved surface portion. The micro vibrator is disposed so that the connecting portion is bonded to the mounting substrate and the curved surface portion is in a hollow state free from other elements. The mounting substrate includes a plurality of electrode portions that are arranged to face and surround a rim of the curved surface portion of the micro vibrator, and spaced apart from each other, the rim being an end of the curved surface portion opposite to the connecting portion. Further, the mounting substrate includes a guard electrode.