Micro Vibrator Mounting Structure for Voltage Detection
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Solution Overview
Problem
Existing mounting structures for micro vibrators with three-dimensional curved surfaces face challenges in detecting applied voltage without damaging the surface electrode, which can lower the Q factor and affect bonding reliability.
Innovation Solution
A mounting structure with a micro vibrator having a hemispherical curved surface and a connecting portion, where a surface electrode covers the connecting portion and the curved surface, and is connected to voltage application and detection wirings on the mounting substrate, allowing voltage detection without direct contact to the surface electrode.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If direct contact is made with the surface electrode for voltage detection, then voltage detection is enabled, but the surface electrode is damaged and Q factor decreases
Solution Approach 1:
The patent introduces an intermediary structure (connection portion with electrode connection portion) that mediates between the voltage detection wiring and the surface electrode. This intermediary allows voltage detection through electrical connection without requiring direct physical contact between the detection wiring and the surface electrode, thereby preventing damage to the surface electrode while enabling voltage detection functionality.
2Reliability
If the micro vibrator is enclosed, then protection and integration are improved, but voltage detection becomes difficult
Solution Approach 1:
The patent implements preliminary action by providing electrode connection portions on the connection portion of the micro vibrator before enclosure. These connection portions are strategically positioned to be accessible during the enclosure process, allowing voltage detection wirings to be connected beforehand. This preliminary connection enables voltage detection functionality to be maintained even after the micro vibrator is enclosed, solving the accessibility issue without compromising protection.
3Measurement precision
If surface electrode is damaged, then voltage detection is achieved, but bonding reliability decreases
Solution Approach 1:
The patent applies segmentation by dividing the electrical connection function into two separate components: the surface electrode on the micro vibrator and the electrode connection portion on the connection portion. This segmentation allows voltage detection to be achieved through the electrode connection portion without damaging the surface electrode, thereby maintaining both voltage detection capability and bonding reliability of the surface electrode.
Data Source
AI summary
In a mounting structure, a micro vibrator has: a curved surface portion having a hemispherical curved surface; a connecting portion extending from the curved surface portion toward a center of a hemispherical shape of the curved surface portion; and a surface electrode covering at least a part of the connecting portion and at least a part of the curved surface portion. A mounting substrate has two or more wirings and a part of the micro vibrator is connected to the mounting substrate. The wirings each have an electrode connection portion connected to a portion of the surface electrode covering the connecting portion at an end. The two or more wirings include a voltage application wiring and a voltage detection wiring. The voltage application wiring is spaced away from the voltage detection wiring on the mounting substrate.