Micro-scale Wireless Heater Using Diamond Support
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Solution Overview
Problem
Existing micro-scale wireless actuators are too large and lack sufficient thermoconductive efficiency due to their dimensions and material properties, limiting their application in miniature systems such as micro-electro-mechanical-systems (MEMS) and biological stimulation.
Innovation Solution
A micro-scale wireless heater with a microcrystalline diamond support layer and a planar coil embedded within, reducing dimensions and enhancing thermoconductive properties, fabricated using electron beam lithography, reactive-ion etching, and chemical vapor deposition technologies.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Length of moving object
If the wireless microactuator uses conventional dimensions and materials, then it can be fabricated with existing processes, but the device size is too large and thermoconductive efficiency is insufficient
Solution Approach 1:
The patent changes the material parameter from conventional polyimide to microcrystalline diamond, which has superior thermal conductivity. This parameter change enables the device to achieve high thermoconductive efficiency at micro-scale dimensions, resolving the contradiction between size reduction and thermal performance
Solution Approach 2:
The patent uses microcrystalline diamond as a composite material that provides both mechanical support and excellent thermal conductivity. This composite approach allows the device to maintain structural integrity while achieving superior heat dissipation at miniaturized dimensions
2Area of moving object
If the wireless microactuator is miniaturized for MEMS applications, then it can satisfy miniature system requirements, but the contact area between coil and support material decreases reducing thermoconductive effect
Solution Approach 1:
The patent changes the thermal conductivity parameter of the support material from polyimide to microcrystalline diamond. This material parameter change compensates for the reduced contact area in miniaturized devices, maintaining effective heat transfer despite the smaller scale
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The micro-scale wireless heater achieves significant size reduction, improved thermoconductive efficiency, and uniformity, enabling applications in micro-scale biological stimulation and origami systems that were previously unattainable with prior technologies.
Implementation Method 1
the inductor and the capacitor converts an electromagnetic wave into heat
Implementation Method 2
the microcrystalline diamond layer is used as the support layer... providing supporting, heat conducting and electrical insulating functions
Data Source
AI summary
A micro-scale wireless heater includes: a support layer having first and second sides and a cavity formed on the second side; a first electrode plate and a first conduction line disposed on the second side; a second electrode plate and a coil both embedded into a slot on the first side, wherein the support layer is disposed between the first and second electrode plates forming a capacitor, the coil forms an inductor, and the slot communicates with the cavity; and a second conduction line disposed in the cavity. The first and second electrode plates are electrically connected together through the first and second conduction lines and the coil in order. Three exposed surfaces of the second electrode plate, the coil and the first side are flush with one another. The inductor and the capacitor convert an electromagnetic wave into heat. A fabrication method and applications thereof are also provided.