Microactuator Elastic Support for High-Speed DMD Settling
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Solution Overview
Problem
Conventional Digital Micromirror Devices (DMDs) face challenges in drive speed and exposure accuracy due to long settling times and phase differences between adjacent micromirrors, which hinder high-precision pattern formation in lithography processes.
Innovation Solution
The development of microactuators with elastic support members and drive mechanisms that allow for precise control of the distance and attitude of optical elements, enabling rapid switching between ON, OFF, and phase-shift states to improve exposure accuracy and productivity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If conventional DMD drive mechanisms are used, then the micromirror can be switched between ON and OFF states, but the settling time is several times longer than the drive time, which reduces exposure speed
Solution Approach 1:
The support member is designed with an elastic section that allows dynamic movement and rapid settling. The elastic section enables the support member to flex during drive and quickly return to its original position, reducing settling time. This dynamic design allows the micromirror to switch states faster with minimal vibration attenuation time.
Solution Approach 2:
The patent changes the physical parameters of the support structure by introducing an elastic section with specific mechanical properties. By adjusting the elasticity and geometry of the support member, the settling time is optimized to be comparable to or shorter than the drive time, enabling high-speed exposure operations.
2Ease of manufacture
If micromirrors are disposed in an inclined state along the base, then the DMD can be manufactured, but phase differences occur between adjacent micromirrors, affecting exposure accuracy
Solution Approach 1:
The patent applies local quality by making each micromirror unit independent with its own support member and drive mechanism. This allows each micromirror to be precisely positioned and controlled individually, eliminating phase differences between adjacent micromirrors while maintaining manufacturability through modular construction.
Solution Approach 2:
The DMD is segmented into independent micromirror units, each with its own support structure. This segmentation allows precise control of each unit's position and orientation, eliminating the phase difference problem that occurs in conventional inclined arrangements while maintaining ease of manufacture through standardized modular components.
3Productivity
If the micromirror switching speed is increased, then exposure productivity improves, but vibration and settling time become problematic
Solution Approach 1:
The elastic support member is designed to provide optimal damping characteristics that allow rapid switching while quickly attenuating vibrations. The dynamic response of the elastic section is tuned to minimize oscillation duration, enabling high productivity without compromising stability.
Solution Approach 2:
The patent enables the system to rush through the switching operation by minimizing the transition time and quickly passing through the vulnerable settling phase. The elastic support member allows the drive to be completed rapidly with immediate vibration attenuation, effectively skipping the problematic long settling period.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enhances the speed and accuracy of exposure processes, allowing for high-precision pattern generation and improved productivity in microdevice manufacturing by reducing settling times and eliminating phase differences between adjacent micromirrors.
Implementation Method 1
a plurality of support members that support the optical element and each have an elastic section in a part thereof; and a plurality of drive mechanisms that are arranged respectively corresponding to a plurality of the support members, wherein each of the plurality of the drive mechanisms changes a distance between a support point at which its corresponding support member supports the optical element and a predetermined reference plane, by transforming the elastic section of the corresponding support member
Data Source
AI summary
A pair of support members each having a spring section in a part thereof support a mirror element, and a pair of drive mechanisms arranged respectively corresponding to a pair of the support members transform the spring sections of the corresponding support members, thereby changing a distance between each of support points at which the support members support the mirror element and a base. Accordingly, the mirror element can be translated by driving all of the drive mechanisms, or the mirror element can be inclined with respect to the base by driving some of the drive mechanisms.