Microbattery Testing with Lithium Formation for Wafer-Level Sorting

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Solution Overview

Problem

Current electrical testing methods for microbatteries, particularly those with a metallic lithium anode (Li-free configuration), are inadequate as they require cycling, which causes structural variations and sensitivity to air, making intermediate sorting and cost-effective testing challenging, and existing methods like OCV measurement and pulse testing are not suitable for Li-free microbatteries.

Innovation Solution

A test method involving sequential steps: initial voltage measurement, controlled charging to form a lithium layer, stabilization, and retention phase measurements to determine valid device parameters without degrading the microbattery, allowing for rapid and non-degrading testing of micro-energy storage devices, including those with metallic lithium anodes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If complete charge-discharge cycling is performed to test microbatteries, then reliable electrical sorting can be achieved, but structural variations occur and metallic lithium formation makes devices sensitive to air

Engineering Contradiction:
Improveelectrical sorting reliabilityVSAvoidsensitivity to air and water vapor
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent applies preliminary action by performing the complete charge-discharge cycling test before encapsulation, when the microbattery is still in a protected environment during manufacturing. This allows reliable electrical sorting to be conducted on wafer-level devices before they are exposed to air, eliminating the harmful sensitivity issue while maintaining test reliability.

Inventive Principle:
Principle #10Preliminary action

2Reliability

If complete charge-discharge cycling is performed, then reliable electrical sorting can be achieved, but testing time and manufacturing cost increase significantly

Engineering Contradiction:
Improveelectrical sorting reliabilityVSAvoidtesting period
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

The patent performs the time-consuming complete charge-discharge cycling test at an early stage in the manufacturing process, before encapsulation. By conducting the full testing sequence (formation charge, rest period, discharge, rest period) on wafer-level microbatteries, the invention achieves reliable sorting without requiring post-encapsulation testing, thereby reducing total manufacturing time and cost.

Inventive Principle:
Principle #10Preliminary action

3Productivity

If Open Circuit Voltage (OCV) measurement is used for sorting, then testing is rapid and non-degrading, but OCV shows significant variability and no correlation with state of charge in Li-free microbatteries

Engineering Contradiction:
Improvetesting speedVSAvoidOCV measurement accuracy
Core Design Contradiction:
ProductivityVSMeasurement precision

Solution Approach 1:

The patent changes the measurement parameter from Open Circuit Voltage (OCV) to terminal voltage during controlled charge and discharge phases. By measuring voltage during active electrochemical processes rather than at open circuit, the method obtains readings that correlate with state of charge and battery health, achieving both measurement precision and productivity.

Inventive Principle:
Principle #35Parameter changes

4Productivity

If internal resistance measurement is used for sorting, then testing is rapid and non-degrading, but internal resistance is not relevant for Li-free microbatteries before lithium anode formation

Engineering Contradiction:
Improvetesting speedVSAvoidsorting relevance
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The patent performs a formation charge step before measurement that creates the metallic lithium anode in Li-free microbatteries. This preliminary action transforms the battery from a state where internal resistance measurement is irrelevant to a state where the lithium anode is formed and internal resistance becomes a meaningful sorting parameter, enabling both rapid testing and reliable sorting.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables rapid and non-degrading testing of microbatteries, allowing for early identification of faulty devices and reducing manufacturing costs by applying the test sequence in parallel, without the need for complete cycling or encapsulation, thus overcoming the limitations of existing methods.

Implementation Method 1

a metallic lithium anode is formed during the first charge of the battery by electrodeposition of Li+ ions (from the cathode) between the electrolyte and the second current collector

Methodology Applied
Scientific EffectElectrodeposition: Electrodeposition

Data Source

PatentEP3933423B1Method for testing one or a plurality of microbattery devices and system implementing the testing method
Publication Date: 2025.01.01 COMMISSARIAT A LENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
  • EP3933423B1 patent drawingFigure 1~3
  • EP3933423B1 patent drawingFigure 4
  • EP3933423B1 patent drawingFigure 5

AI summary

The invention relates to a method for testing at least one micro-energy storage device comprising a metallic lithium anode formed by electrodeposition of ions on a metal inert to lithium ions, the method comprising a succession of steps during the manufacture of said anode: ∘ a step of measuring the initial voltage OCV of the micro-energy storage device; ∘ a first charge step comprising the application of a current, the measurement of the voltage and the internal resistance of the device to verify the conformity of the measurements on a very thin layer of lithium formed as an anode; ∘ a second charge stabilization step comprising the application of a current and the measurement of the voltage of the device to verify the conformity of the measurements on a thin layer of lithium formed as an anode;• a zero-current retention step and voltage measurement to confirm the conformity of the micro-energy storage device. The invention also relates to a system for implementing the method;