Microbeam Optical Sensor Structure for 2D Beam Steering

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Solution Overview

Problem

Existing LiDAR systems face limitations in achieving large scanning angles without significant wavelength modification, which is challenging due to the lack of readily available laser sources with sufficient variability and performance requirements, leading to low power or limited scanning amplitude.

Innovation Solution

A micromechanical structure incorporating a microbeam with a phased optical array and a real-time position sensor, such as a piezoelectric gauge or optical gauge, allows for two-dimensional scanning by controlling the beam orientation in two dimensions without altering the laser wavelength, ensuring safety through real-time tracking and modulation of commands.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If wavelength modification is used to achieve large scanning angles, then scanning amplitude is improved, but laser source availability and system reliability deteriorate

Engineering Contradiction:
Improvescanning amplitudeVSAvoidlaser source availability
Core Design Contradiction:
Adaptability or versatilityVSReliability

Solution Approach 1:

The patent changes the physical parameter of the microbeam (its orientation angle θ) rather than changing the laser wavelength. By mechanically tilting the microbeam carrying the phased array antennas, large scanning angles can be achieved while using standard, reliable laser sources with fixed wavelengths.

Inventive Principle:
Principle #35Parameter changes

2Adaptability or versatility

If 2D phased optical arrays with emitter matrices are used, then two-directional scanning is improved, but device complexity and manufacturing difficulty increase

Engineering Contradiction:
Improvetwo-directional scanning capabilityVSAvoidcircuit constraints
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent separates the two scanning directions into independent components: the phased array provides scanning in one direction (φ) while the microbeam tilt provides scanning in the orthogonal direction (θ). This segmentation avoids the complexity of controlling individual emitters in a 2D matrix while achieving equivalent 2D scanning functionality.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The microbeam acts as an intermediary carrier that physically supports and orients the phased array. By tilting this intermediary structure, the patent achieves second-direction scanning without requiring complex individual emitter control circuits.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Reliability

If microbeam position is not monitored, then device complexity is reduced, but safety and reliability deteriorate due to potential excessive power concentration

Engineering Contradiction:
ImprovesafetyVSAvoidposition monitoring system
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent implements a feedback system where a position sensor continuously monitors the microbeam orientation and provides this information to a controller. The controller uses this feedback to modulate the laser power or adjust operation to prevent excessive power concentration in any single direction, ensuring safety while maintaining system reliability.

Inventive Principle:
Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables large angular variations in beam scanning, enhances safety by preventing excessive power concentration, and ensures reliable operation by monitoring the microbeam's position in real-time, suitable for consumer applications like automotive LiDAR systems.

Implementation Method 1

an actuator controlled to modify the orientation of the microbeam

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

Phase modulators, generally one per antenna, which control the phase differences between the optical signals emitted from one antenna to another. A linear phase gradient is applied between the signals emitted by each antenna along the line, producing interference.

Methodology Applied
Scientific EffectInterference: Interference

Implementation Method 3

an onboard sensor embedded in the microbeam transmitting a signal representative of a current orientation of the microbeam

Methodology Applied
Scientific EffectPhotoelastic effect: Photoelasticity

Data Source

PatentEP4707913A1Micromechanical structure for an optical sensor
Publication Date: 2026.03.11 COMMISSARIAT A LENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
  • EP4707913A1 patent drawingFigure 1~2
  • EP4707913A1 patent drawingFigure 3
  • EP4707913A1 patent drawingFigure 4~5(c)

AI summary

A micromechanical structure for an optical sensor, comprising a microbeam (100) flexing about a first direction, an actuator (230) controlled to modify the orientation of the microbeam (100) about said direction (x), and at a free end of said microbeam (100), phased optical array antennas (223) (120) arranged to emit a light beam steerable about a second direction (y) transverse to the first direction. The micromechanical structure further comprises a sensor embedded in the microbeam transmitting a signal representative of said current orientation of the microbeam about the first direction.