Microbeam Optical Sensor Structure for 2D LiDAR Beam Steering

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Solution Overview

Problem

Existing lidar systems face challenges in achieving large scanning angles without significant wavelength variability, and integrating matrix arrays of optical emitters leads to low-performance systems or limited scanning amplitudes, while MEMS-based solutions require real-time tracking of microbeams for safety and reliability.

Innovation Solution

A micromechanical optical-sensor structure with a microbeam equipped with an optical phased array and an on-board sensor, such as a piezoelectric gauge or Mach-Zehnder interferometer, to track the microbeam's position in real time, allowing two-dimensional scanning without wavelength modification and ensuring safe operation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If the wavelength of the laser is significantly modified to obtain large scanning angles in θ, then the scanning amplitude is improved, but the availability and performance of laser sources deteriorate

Engineering Contradiction:

Improvescanning amplitudeVSAvoidlaser source performance

Core Design Contradiction:

Adaptability or versatilityVSReliability

Solution Approach 1:

The patent replaces optical wavelength modification with mechanical microbeam tilting to achieve beam steering. The microbeam is tilted by applying voltage to piezoelectric actuators, which mechanically adjusts the beam direction without changing the laser wavelength, thus maintaining laser source performance while achieving large scanning angles

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the physical parameter used for beam steering from optical wavelength to mechanical angle. By controlling the tilt angle of the microbeam through piezoelectric actuation, the system achieves large scanning amplitudes while keeping the laser operating at its optimal wavelength

Inventive Principle:

Principle #35Parameter changes

2Adaptability or versatility

If a matrix array of optical emitters is used to produce 2D OPAs, then two-dimensional beam steering is achieved, but the device complexity and performance deteriorate

Engineering Contradiction:

Improvebeam steering capabilityVSAvoidcircuit constraints

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent segments the beam steering function into two independent parts: a 1D optical phased array for one dimension and a mechanically tilted microbeam for the other dimension. This segmentation avoids the complexity of a full 2D matrix array while achieving equivalent two-dimensional steering capability

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The patent adds a mechanical dimension (microbeam tilt) to the existing optical dimension (OPA phase control). This dimensional addition enables 2D beam steering without requiring a 2D array of optical emitters, thus reducing circuit complexity

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

3Adaptability or versatility

If MEMS technology is integrated with photonics for 2D scanning, then scanning capability is improved, but safety and reliability monitoring becomes difficult

Engineering Contradiction:

Improvescanning capabilityVSAvoidmicrobeam position tracking

Core Design Contradiction:

Adaptability or versatilityVSDifficulty of detecting and measuring

Solution Approach 1:

The patent implements an optical feedback system using a position sensor that reads the microbeam position in real-time. This sensor provides continuous monitoring of the beam direction, enabling safety verification and closed-loop control of the scanning operation

Inventive Principle:

Principle #23Feedback

Solution Approach 2:

The system uses the same optical infrastructure (waveguides, light sources) to provide both the primary beam steering function and the position monitoring function. The optical field serves dual purposes: steering the main beam and enabling position detection through the integrated sensor

Inventive Principle:

Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables reliable two-dimensional scanning with large angular variations and real-time monitoring of the microbeam position, enhancing safety and performance in lidar systems.

Implementation Method 1

an on-board sensor, such as a piezoelectric gauge or Mach-Zehnder interferometer, to track the microbeam's position in real time

Methodology Applied

Scientific EffectInterference: Interference

Implementation Method 2

an actuator controlled to modify the orientation of the microbeam about said first direction

Methodology Applied

Scientific EffectPiezoelectric effect: Piezoelectric Effect

Data Source

PatentUS20260072141A1Micromechanical optical-sensor structure

Publication Date: 2026.03.12 COMMISSARIAT A LENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES

AI summary

A micromechanical optical-sensor structure includes a microbeam that is able to bend about a first direction, an actuator controlled to modify the orientation of the microbeam about the direction and, at a free end of the microbeam, antennas of an optical phased array, the antennas being arranged to emit a light beam that is orientable about a second direction transverse to the first direction. The micromechanical structure in addition includes an on-board sensor in the microbeam transmitting a signal representative of the current orientation of the microbeam about the first direction.