Microbolometer Resistance Reduction Layer Noise
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Solution Overview
Problem
Existing microbolometers face a trade-off between improving temperature coefficient of resistance (TCR) and reducing noise, which affects their overall performance in detecting temperature changes.
Innovation Solution
The microbolometer design includes a resistance reduction layer with a high-concentration impurity layer or intermetallic compounds, which reduces interface resistance and enhances noise reduction while maintaining TCR values.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the TCR value of the bolometer is increased to improve responsivity, then the output voltage signal increases, but noise increases due to the trade-off relationship between TCR and noise in silicon thin films
Solution Approach 1:
A resistance reduction layer is introduced as an intermediary component between the substrate and the absorption layer. This layer has lower resistance than the absorption layer and reduces the overall series resistance of the bolometer, thereby reducing noise without compromising the TCR of the absorption layer, which maintains responsivity.
Solution Approach 2:
The resistance reduction layer changes the electrical resistance parameter of the bolometer structure by providing a low-resistance path. This parameter change reduces the series resistance that contributes to noise while allowing the absorption layer to maintain its high TCR for responsivity.
2Device complexity
If the resistance reduction layer is not divided by channels, then the structure is simpler, but the interface resistance between the absorption layer and resistance layer increases
Solution Approach 1:
The resistance reduction layer is segmented into multiple regions by channels that extend from the absorption layer down to the resistance reduction layer. This segmentation creates multiple parallel conduction paths, reducing the overall interface resistance between the absorption layer and the resistance reduction layer while maintaining a relatively simple overall structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design improves the thermal resolution characteristics of the microbolometer by reducing noise while maintaining high TCR values, thereby enhancing its ability to detect temperature changes effectively.
Implementation Method 1
an absorption layer configured to absorb incoming light in a specific wavelength range
Implementation Method 2
a resistance layer provided between the substrate and the absorption body of the absorption layer and having a resistance value that changes based on temperature variations caused by thermal energy absorbed through the absorption layer
Data Source
AI summary
A microbolometer and a method of manufacturing the same are provided. The microbolometer may include a substrate, an absorption layer configured to absorb incoming light in a specific wavelength range and including an absorption body configured to float from the substrate and electrically isolated by a channel; a resistance layer provided between the substrate and the absorption body of the absorption layer and having a resistance value that changes based on temperature variations caused by thermal energy absorbed through the absorption layer; and a resistance reduction layer provided between the absorption layer and the resistance layer to reduce interface resistance and divided by a channel correspond to the channel of the absorption layer.