Microbolometer Thick Optical Filter and Waveguide Integration

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Solution Overview

Problem

Conventional cameras, including digital cameras, are polarization blind without add-on components, leading to issues such as narrow acceptance angles, low light collection, low contrast, narrow bandwidth, crosstalk, high expense, and difficulty in fabrication due to the use of thick optical filters required for ideal response in infrared imaging.

Innovation Solution

The implementation of a pixel device with a thick optical filter component having a thickness between about λ and 10λ, where λ is the operation wavelength, combined with micro-optics to guide and focus incident light effectively to the optical sensor, including a microlens and waveguide, and integrated with color and polarization filters to enhance light collection and reduce crosstalk.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If thick optical filters (thickness between λ and 10λ) are used to achieve ideal polarization and color filtering response, then filtering performance and contrast are improved, but light collection efficiency deteriorates and device complexity increases

Engineering Contradiction:
Improvepolarization filtering performanceVSAvoidlight collection efficiency
Core Design Contradiction:
Measurement precisionVSLoss of energy

Solution Approach 1:

The patent introduces micro-optics components (microlenses and waveguides) that add a new dimensional aspect to light management. The microlenses focus incident light onto the waveguide inputs, and the waveguides channel light through extended path lengths to the filter outputs, effectively adding spatial dimensions to overcome the limitations of thick filters alone

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The waveguide acts as an intermediary component between the incident light and the thick optical filter. It captures light over an extended area and guides it to the filter output, mediating the interaction between light and the thick filter to improve both light collection and filtering performance simultaneously

Inventive Principle:
Principle #24Intermediary (Mediator)

2Measurement precision

If thick optical filters are used for ideal infrared imaging response, then polarization sensitivity is improved, but fabrication difficulty and device complexity increase

Engineering Contradiction:
Improvepolarization sensitivityVSAvoidfabrication complexity
Core Design Contradiction:
Measurement precisionVSEase of manufacture

Solution Approach 1:

The patent divides the imaging device into separate functional modules: microlens array for light focusing, waveguide array for light channeling, and thick optical filter array for polarization filtering. This segmentation allows each component to be optimized and fabricated independently using different processes, reducing overall fabrication complexity

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The waveguide structure serves multiple functions simultaneously: it collects light over an extended area, channels light to the filter outputs, and enables the use of thick filters that would otherwise be impossible to integrate. This multi-functionality reduces the need for additional specialized components

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Device complexity

If conventional cameras without add-on components are used, then device simplicity is maintained, but polarization detection capability is lost

Engineering Contradiction:
Improvedevice simplicityVSAvoidpolarization detection capability
Core Design Contradiction:
Device complexityVSAdaptability or versatility

Solution Approach 1:

The patent merges polarization filtering capabilities directly into the imaging sensor structure by integrating microlenses, waveguides, and thick optical filters in a single integrated array. This combination eliminates the need for separate add-on polarization components while maintaining device compactness and simplicity

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution mitigates the disadvantages of thick optical filters by improving light collection, contrast, and bandwidth while reducing crosstalk and fabrication complexity, enabling efficient polarization and color-sensitive imaging across a wide range of wavelengths.

Implementation Method 1

an optical component having an input and an output, adapted to focus and guide an incident light at the input

Methodology Applied
Scientific EffectFocusing: Lens

Implementation Method 2

and waveguide, and integrated with color and polarization filters to enhance light collection

Methodology Applied
Scientific EffectWaveguide: Waveguide (optics)

Implementation Method 3

a thick optical filter component having a thickness between about λ and 10λ, where λ is an operation wavelength of the pixel device

Methodology Applied
Scientific EffectOptical filtering: Filter (optical)

Implementation Method 4

integrated with color and polarization filters to enhance light collection

Methodology Applied
Scientific EffectPolarization: Polarisation

Implementation Method 5

an optical sensor component disposed at an output of the thick optical filter component

Methodology Applied
Scientific EffectPhotoelectric detection: Photoelectric Effect

Data Source

PatentUS11371888B2Microbolometer apparatus, methods, and applications
Publication Date: 2022.06.28 THE ARIZONA BOARD OF REGENTS ON BEHALF OF THE UNIV OF ARIZONA
  • US11371888B2 patent drawing
  • US11371888B2 patent drawing
  • US11371888B2 patent drawing

AI summary

A polarization and color sensitive pixel device and a focal plane array made therefrom. Each incorporates a thick color/polarization filter stack and microlens array for visible (0.4-0.75 micron), near infrared (0.75-3 micron), mid infrared (3-8 micron) and long wave infrared (8-15 micron) imaging. A thick pixel filter has a thickness of between about one to 10× the operational wavelength, while a thick focal plane array filter is on the order of or larger than the size or up to 10× the pitch of the pixels in the focal plane array. The optical filters can be precisely fabricated on a wafer. A filter array can be mounted directly on top of an image sensor to create a polarization camera. Alternatively, the optical filters can be fabricated directly on the image sensor.