Microbolometer Pixel Layout With Vertical Legs for Higher Fill Factor

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Solution Overview

Problem

Existing microbolometer systems face challenges in increasing the fill factor of infrared detector arrays due to the significant area occupied by leg supports, which limits the light-sensitive area and device performance.

Innovation Solution

The implementation of vertically oriented microbolometer legs, which are more area-efficient compared to conventional horizontal legs, allows for a reduced leg area without compromising the leg's performance, thereby increasing the fill factor of the array.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of moving object

If horizontal leg supports are used to connect microbolometer pixels to contacts, then structural integrity is maintained, but the area occupied by legs increases, reducing the fill factor of the array

Engineering Contradiction:

Improvelight-sensitive areaVSAvoidarea occupied by leg supports

Core Design Contradiction:

Area of moving objectVSArea of stationary object

Solution Approach 1:

The patent transitions from horizontal leg supports to vertical leg supports that extend downward from the pixel plane to the contact plane. This dimensional change allows the legs to occupy minimal area on the pixel surface while maintaining structural connectivity through the third dimension (vertical depth), thereby increasing the fill factor without compromising structural integrity

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

2Area of moving object

If the width and length of leg supports are reduced to increase fill factor, then light-sensitive area increases, but device performance may be compromised

Engineering Contradiction:

Improvefill factorVSAvoiddevice performance

Core Design Contradiction:

Area of moving objectVSReliability

Solution Approach 1:

The patent changes the geometric parameters of the leg supports by transitioning from horizontal to vertical orientation. This parameter change allows the legs to achieve sufficient structural performance through increased vertical dimension while maintaining reduced horizontal footprint, thus improving fill factor without sacrificing device performance

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The use of vertical microbolometer legs enhances the fill factor of infrared detector arrays, improving device performance and efficiency while maintaining the necessary structural support.

Implementation Method 1

A microbolometer is an example of a type of infrared detector that may be used within an infrared imaging device

Methodology Applied

Scientific EffectInfrared radiation detection: Infrared Radiation

Implementation Method 2

The change in resistance of each microbolometer is translated into a time-multiplexed electrical signal

Methodology Applied

Scientific EffectResistive heating: Joule Heating

Data Source

PatentUS12243904B2Microbolometer systems and methods

Publication Date: 2025.03.04 TELEDYNE FLIR COMMERICAL SYST INC

AI summary

Microbolometer systems and methods are provided herein. For example, an infrared imaging device includes a microbolometer array. The microbolometer array includes a plurality of microbolometers. Each microbolometer includes a microbolometer bridge that includes a first portion and a second portion. The first portion includes a resistive layer configured to capture infrared radiation. The second portion includes a second portion having a plurality of perforations defined therein.