Microcantilever Manufacturing via Adhesive-Nonadhesive Base Curing

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Solution Overview

Problem

Conventional microcantilevers made of hard materials like silicon respond only to limited forces, limiting their sensitivity and applicability as sensors, and existing methods struggle to manufacture thin, accurately shaped hydrogel microcantilevers due to difficulties in reducing thickness and achieving uniformity.

Innovation Solution

A method involving a base block with adhesive and non-adhesive bases, where a liquid synthetic resin is supplied and cured between these bases to form a microcantilever with one end adhered to the adhesive base and the other as a free end, using polydimethylsiloxane and polyethylene glycol diacrylate to ensure easy detachment and achieve a flat, thin, and accurately shaped microcantilever.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If hard materials such as silicon, silicon nitride or silicon oxide are used for microcantilever sensors, then the structural strength and durability are improved, but the sensitivity to weak stress or force deteriorates

Engineering Contradiction:

Improvestructural strengthVSAvoidsensitivity to weak stress

Core Design Contradiction:

StrengthVSReliability

Solution Approach 1:

The invention changes the material parameter from hard materials (silicon, silicon nitride) to soft materials (hydrogel, synthetic resin). This parameter change enables the microcantilever to respond to weak stress and force while maintaining structural integrity through the specific material properties of soft materials.

Inventive Principle:

Principle #35Parameter changes

2Adaptability or versatility

If two-photon polymerization reaction is used to synthesize hydrogel microcantilevers, then the biocompatibility and stimuli-response are improved, but the thickness uniformity deteriorates and process time increases

Engineering Contradiction:

ImprovebiocompatibilityVSAvoidthickness uniformity

Core Design Contradiction:

Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

The invention replaces the two-photon polymerization process with a photolithography process. This substitution maintains the ability to create hydrogel microcantilevers with good biocompatibility while achieving uniform thickness and reducing process time through a more controlled light-based curing mechanism.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Length of moving object

If focal lasers are used for three-dimensional stereolithography to synthesize hydrogel microcantilevers, then the length and width can be reduced, but the thickness reduction is limited due to laser permeation issues

Engineering Contradiction:

Improvemicrocantilever lengthVSAvoidthickness control

Core Design Contradiction:

Length of moving objectVSManufacturing precision

Solution Approach 1:

The invention replaces focal laser three-dimensional stereolithography with a photolithography process using a photomask. This substitution enables precise thickness control and allows for the fabrication of thinner microcantilevers by controlling the light exposure through the mask rather than relying on laser permeation.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

4Productivity

If conventional photolithography is used to cure liquid synthetic resin, then the manufacturing speed is improved, but the shape accuracy deteriorates due to light scattering

Engineering Contradiction:

Improvemanufacturing speedVSAvoidshape accuracy

Core Design Contradiction:

ProductivityVSManufacturing precision

Solution Approach 1:

The invention introduces a photomask as an intermediary between the light source and the liquid synthetic resin. The photomask patterns the light before it reaches the resin, preventing light scattering from affecting shape accuracy while maintaining the efficiency of photolithography for rapid manufacturing.

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables the production of sensitive, thin, and accurately shaped microcantilevers with soft materials, overcoming the limitations of hard material microcantilevers and allowing for improved sensitivity and mass production, with the ability to form coatings and other elements on the microcantilevers.

Implementation Method 1

curing the liquid synthetic resin for cantilevers via a boundary between the adhesive base and the non-adhesive base

Methodology Applied

Scientific EffectPhotopolymerization: Photopolymerisation

Implementation Method 2

the adhesive base has stronger adhesivity to the cured synthetic resin for cantilevers than the non-adhesive base

Methodology Applied

Scientific EffectAdhesion: Adhesive

Data Source

PatentUS10202276B2Method for manufacturing microcantilever

Publication Date: 2019.02.12 IND UNIV COOP FOUND SOGANG UNIV

AI summary

Disclosed is a method for manufacturing a microcantilever having a predetermined thickness that includes forming a liquid synthetic resin for cantilevers to a thickness corresponding to the thickness of the microcantilever on an upper surface of a base block having an adhesive base and a non-adhesive base, and curing the liquid synthetic resin for cantilevers via a boundary between the adhesive base and the non-adhesive base, wherein the adhesive base has stronger adhesivity to the cured synthetic resin for cantilevers than the non-adhesive base.