Microchannel Chip Module Cooling for CTE Stress Relief

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Solution Overview

Problem

Existing cooling solutions for electronic modules face challenges due to thermal resistance and heat transfer inefficiencies, particularly in high-power density modules with mismatched materials leading to thermal stress and potential device failure.

Innovation Solution

The integration of a microchannel cooler with a glass manifold and CTE-matched semiconductor chips, along with a first RDL or organic interposer that is CTE mismatched, reduces thermal resistance and improves heat dissipation, enhancing reliability and reducing leakage currents.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If a microchannel cooler is integrated with functional semiconductor chips to improve heat dissipation, then thermal resistance is reduced and operating temperature is lowered, but CTE mismatch between materials causes thermal stress and potential device failure

Engineering Contradiction:
Improvesemiconductor chip operating temperatureVSAvoiddevice reliability under thermal stress
Core Design Contradiction:
TemperatureVSReliability

Solution Approach 1:

A CTE-matched microchannel chip is introduced as an intermediary component between the functional semiconductor chips and the cooling system. This microchannel chip has a coefficient of thermal expansion that matches the semiconductor chips, serving as a thermal and mechanical bridge that enables effective heat dissipation while preventing CTE-mismatch-induced thermal stress and device failure

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The cooling system employs a composite structure consisting of a glass manifold and a microchannel chip made of CTE-matched material. This composite design combines the thermal management capabilities of the microchannel structure with the thermal expansion properties that match the semiconductor chips, achieving both effective cooling and stress mitigation

Inventive Principle:
Principle #40Composite materials

2Reliability

If CTE-matched materials are used for all components to prevent thermal stress, then device reliability is improved, but heat transfer efficiency is reduced due to material property constraints

Engineering Contradiction:
Improvedevice reliability under thermal stressVSAvoidheat transfer efficiency
Core Design Contradiction:
ReliabilityVSLoss of energy

Solution Approach 1:

Different components of the cooling system have different material properties optimized for their specific functions: the microchannel chip is made of CTE-matched material to prevent thermal stress at the semiconductor interface, while the glass manifold can be made of materials optimized for heat transfer efficiency. This local differentiation of material properties allows the system to achieve both reliability and thermal performance

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively lowers semiconductor chip operating temperatures, improves reliability, and maintains structural integrity despite CTE mismatches, ensuring reliable operation and reduced thermal stress.

Implementation Method 1

a microchannel cooler having a glass manifold contacting a first side of a microchannel chip... reduces semiconductor chip operating temperature

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 2

glass manifold contacting a first side of a microchannel chip... provides fluid distribution to the microchannel chip

Methodology Applied
Scientific EffectFluid distribution through microchannels: Convection

Implementation Method 3

each functional semiconductor chip of the plurality of functional semiconductor chips is coefficient of thermal expansion (CTE) matched to the microchannel cooler

Methodology Applied
Scientific EffectThermal expansion: Thermal Expansion

Data Source

PatentUS20250349798A1Multiple chip module with integrated microchannel cooling
Publication Date: 2025.11.13 INTERNATIONAL BUSINESS MACHINE CORPORATION
  • US20250349798A1 patent drawing
  • US20250349798A1 patent drawing
  • US20250349798A1 patent drawing

AI summary

An electronic module is provided that includes a microchannel cooler having a glass manifold contacting a first side of a microchannel chip, a plurality of functional semiconductor chips located face up on a second side of the microchannel chip. Each semiconductor chip of the plurality of functional semiconductor chips is coefficient of thermal expansion (CTE) matched, and a first redistribution layer (RDL) containing structure or organic interposer is located above and in electrical contact with the plurality of functional semiconductor chips. In either case, the first RDL containing structure and the organic imposer are not CTE matched to the functional semiconductor chips.