Microchannel Substrate Cooling for GPU-HBM Package Heat Dissipation

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Solution Overview

Problem

Current thermal management systems for semiconductor devices, particularly high-capacity and high-bandwidth memory devices, face challenges in dissipating heat due to space constraints and limited effectiveness of top-mounted heat spreaders, leading to performance limitations.

Innovation Solution

Integration of microchannels into the substrate beneath semiconductor devices, with a coolant flowing through these channels to dissipate heat from both memory and logic devices, enhancing thermal management.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If top-mounted heat spreaders and heatsinks are used, then heat dissipation is improved, but space constraints are violated and performance specifications are not met

Engineering Contradiction:
Improveheat dissipationVSAvoidspace constraints
Core Design Contradiction:
TemperatureVSVolume of moving object

Solution Approach 1:

The patent transitions from top-mounted heat dissipation structures to bottom-mounted microchannel heat sinks integrated into the substrate. This dimensional change allows heat to be dissipated from the underside of the semiconductor package, effectively utilizing previously unused space and enabling improved thermal management without increasing the overall package volume.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent employs liquid coolant flowing through microchannels etched into the substrate to transfer heat away from the semiconductor devices. This hydraulic approach uses fluid circulation to efficiently remove heat from high-power devices, achieving superior heat dissipation performance while maintaining compact form factor.

Inventive Principle:
Principle #29Pneumatics and hydraulics

2Productivity

If semiconductor devices have greater capacities and faster performance, then device performance is improved, but heat generation increases and becomes a limiting factor

Engineering Contradiction:
Improvedevice performanceVSAvoidheat generation
Core Design Contradiction:
ProductivityVSTemperature

Solution Approach 1:

The patent introduces a liquid coolant as an intermediary medium to transfer heat from the semiconductor devices through the microchannel heat sinks. This mediator enables efficient thermal energy transport from high-performance devices that generate excessive heat, allowing the devices to operate at higher performance levels without thermal limitations.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent changes the thermal management approach from passive air cooling to active liquid cooling through microchannels. This parameter change in the cooling mechanism enables dissipation of higher heat loads generated by high-capacity, fast-performance semiconductor devices, removing the thermal bottleneck that previously limited device performance.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Effectively conveys thermal energy away from semiconductor devices, improving heat dissipation and meeting performance specifications in space-constrained environments.

Implementation Method 1

microchannels for thermal management... coolant flowing through these channels to dissipate heat

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 2

coolant flowing through these channels to dissipate heat from both memory and logic devices

Methodology Applied
Scientific EffectConvection: Convection

Data Source

PatentUS12593692B2Thermal management of GPU-HBM package by microchannel integrated substrate
Publication Date: 2026.03.31 MICRON TECHNOLOGY INC
  • US12593692B2 patent drawing
  • US12593692B2 patent drawing
  • US12593692B2 patent drawing

AI summary

Semiconductor packages and/or assemblies having microchannels, a microchannel module, and/or a microfluidic network for thermal management, and associated systems and methods, are disclosed herein. The semiconductor package and/or assembly can include a substrate integrated with a microchannel and a coolant disposed within the microchannel to dissipate heat from a memory device and/or a logic device of the semiconductor package and/or assembly. The microchannel can be configured beneath the memory device and/or the logic device.