Micro-Device Adhesive Transfer for Precise MicroLED Placement

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Solution Overview

Problem

The manufacturing of microLED panels with micron-scale LEDs based on III-V semiconductor technology faces challenges such as technical and manufacturing hurdles, particularly in depositing and growing III-V semiconductor microLEDs directly on a final display substrate, and is difficult to produce in curved or bendable displays.

Innovation Solution

A method for transferring micro-devices involves selectively treating an adhesive layer on a donor substrate to create treated and untreated portions, allowing for precise separation and alignment of micro-devices onto a destination substrate using illumination, enabling high precision and increased throughput, and allowing for the transfer of micro-devices to flexible or curved substrates.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If microLEDs are deposited directly on a final display substrate, then integration is achieved, but manufacturing complexity and difficulty increase significantly

Engineering Contradiction:
Improveease of manufactureVSAvoiddevice complexity
Core Design Contradiction:
Ease of manufactureVSDevice complexity

Solution Approach 1:

The manufacturing process is segmented into distinct stages: growing microLEDs on a separate donor substrate, transferring them to a transfer substrate, and finally placing them on the destination substrate. This segmentation allows each substrate to be optimized for its specific function, avoiding the complexity of direct deposition while achieving integration.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

A transfer substrate is introduced as an intermediary component between the donor substrate and the destination substrate. This intermediary enables the microLEDs to be grown under optimal conditions on the donor substrate, then transferred via the transfer substrate to the final display substrate, simplifying the overall manufacturing process.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Manufacturing precision

If microLEDs are transferred using conventional methods, then transfer is achieved, but precision and alignment accuracy deteriorate

Engineering Contradiction:
ImproveprecisionVSAvoidthroughput
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

Alignment marks are pre-formed on both the donor substrate and transfer substrate before the transfer process. This preliminary action enables precise alignment during transfer without requiring complex real-time adjustment mechanisms, maintaining both precision and productivity.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent replaces complex mechanical alignment systems with a simplified process using pre-formed alignment marks and controlled substrate positioning. This substitution reduces mechanical complexity while maintaining high precision transfer accuracy.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Adaptability or versatility

If rigid substrates are used for microLED growth, then fabrication is easier, but flexibility and bendability are lost

Engineering Contradiction:
ImproveflexibilityVSAvoidease of manufacture
Core Design Contradiction:
Adaptability or versatilityVSEase of manufacture

Solution Approach 1:

The system is segmented into a rigid donor substrate for easy microLED growth and a flexible destination substrate for the final application. This segmentation allows each substrate to be chosen based on its optimal properties, achieving both ease of manufacture and flexibility.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent changes the substrate material parameter from rigid to flexible at the transfer stage. MicroLEDs are grown on rigid substrates under controlled conditions, then transferred to flexible substrates, allowing the final display to achieve bendability while maintaining manufacturing ease.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method allows for the efficient transfer of micro-devices with high precision, increasing yield and reducing manufacturing time and cost, enabling the production of multi-color displays and flexible displays with microLEDs, and accommodating different pitch arrangements between the donor and destination substrates.

Implementation Method 1

The first adhesive layer is exposed to illumination in a region that overlaps at least some of the treated portion and at least some of the untreated portion, and exposing the first adhesive layer to illumination neutralizes the at least some of the untreated portion

Methodology Applied
Scientific EffectPhotopolymerization: Photopolymerisation

Data Source

PatentUS12176384B2Methods of parallel transfer of micro-devices using treatment
Publication Date: 2024.12.24 APPLIED MATERIALS INC
  • US12176384B2 patent drawing
  • US12176384B2 patent drawing
  • US12176384B2 patent drawing

AI summary

A method of transferring micro-devices includes selectively treating a first adhesive layer to form a treated portion and an untreated portion while micro-devices are attached the first adhesive layer. A second adhesive layer on a second surface is placed to abut the micro-devices. The first adhesive layer is exposed to illumination in a region that overlaps at least some of the treated portion and at least some of the untreated portion. Exposing the first adhesive layer to illumination neutralizes the at least some of the untreated portion to create a neutralized portion that is less adhesive than an exposed area of the treated portion. The first surface is separated from the second surface such that micro-devices in the treated portion remain attached to the first surface and micro-devices in the neutralized portion are attached to the second surface and separate from the first surface.