Microdevice Bonding via Segmented Negative Pressure Channels

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Solution Overview

Problem

Existing microdevices with PDMS substrates face issues with weakened adsorption forces after hydrophilic treatment, leading to solution leakage due to inadequate bonding between PDMS and counter substrates, especially with continuous negative pressure channels that may not ensure sufficient evacuation and result in larger chip sizes and incomplete substrate joining.

Innovation Solution

A microdevice design featuring a first substrate and a second substrate with grooves forming microchannels and recesses that create closed spaces, where the closed spaces are depressurized to enhance the adsorption force and secure bonding between substrates using atmospheric pressure, preventing liquid leakage and ensuring uniform substrate joining.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If a continuous negative pressure channel is provided on the outer edge of the microchip to evacuate air and increase bonding force, then the bonding force between substrates is improved, but the channel may close due to atmospheric pressure preventing sufficient evacuation, and the outer shape of the microchip becomes larger

Engineering Contradiction:
Improvebonding forceVSAvoidmicrochip size
Core Design Contradiction:
StrengthVSLength of stationary object

Solution Approach 1:

The continuous negative pressure channel is divided into multiple discrete negative pressure channels arranged in an array. Each channel is independently evacuated and sealed, preventing channel closure due to atmospheric pressure. This segmentation allows sufficient evacuation while maintaining a compact microchip size, as the discrete channels can be distributed efficiently within the substrate area rather than requiring a large outer edge channel.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The negative pressure channels are arranged in a two-dimensional array pattern rather than a single continuous channel along the outer edge. This dimensional change from one-dimensional linear arrangement to two-dimensional grid arrangement increases evacuation efficiency and allows the channels to be positioned optimally within the substrate, reducing the overall microchip footprint while maintaining sufficient bonding force.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Strength

If a continuous negative pressure channel is provided on the outer edge to evacuate air, then bonding force is improved, but the PDMS substrate and counter substrate cannot sufficiently join at portions surrounding the channel and positioned at the center

Engineering Contradiction:
Improvebonding forceVSAvoidsubstrate joining uniformity
Core Design Contradiction:
StrengthVSReliability

Solution Approach 1:

Multiple discrete negative pressure channels are distributed across the substrate in an array pattern, allowing uniform bonding pressure to be applied across the entire bonding surface including center regions. The segmented channel arrangement ensures that no large continuous channel blocks the bonding interface, enabling sufficient substrate joining at all positions while maintaining overall bonding force through collective action of multiple channels.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The negative pressure channels are strategically positioned and sized to create localized evacuation zones that do not interfere with surrounding bonding areas. Each channel operates independently to evacuate its local region, while the spaces between channels allow uniform bonding contact between substrates. This local quality approach ensures both sufficient evacuation and uniform substrate joining across the entire bonding surface.

Inventive Principle:
Principle #3Local quality

3Adaptability or versatility

If the PDMS substrate is subjected to hydrophilic treatment to improve wettability, then solution wettability is improved, but the adsorption force of the PDMS substrate weakens causing solution leakage

Engineering Contradiction:
ImprovewettabilityVSAvoidadsorption force
Core Design Contradiction:
Adaptability or versatilityVSStrength

Solution Approach 1:

The bonding mechanism is segmented into multiple independent negative pressure channels rather than relying on a single continuous channel or overall substrate adsorption. This segmentation allows the hydrophilic treatment to be applied for wettability without compromising overall bonding, as each discrete channel maintains its own evacuation and sealing capability, preventing solution leakage even when overall adsorption force is reduced.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The bonding mechanism transitions from relying on adsorption force to using pneumatic pressure differential through evacuated channels. By creating negative pressure zones within discrete channels and sealing them, the system uses pneumatic pressure to maintain bonding strength independent of the PDMS substrate's adsorption properties. This allows hydrophilic treatment to be applied for improved wettability without sacrificing bonding strength, as the pneumatic pressure differential compensates for reduced adsorption force.

Inventive Principle:
Principle #29Pneumatics and hydraulics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The microdevice effectively suppresses liquid leakage from microchannels and ensures strong, uniform bonding between substrates, maintaining the integrity of the microdevice structure and preventing solution loss during fluorescence polarization immunoassay processes.

Implementation Method 1

the adsorption force of the PDMS substrate may weaken due to the hydrophilic treatment and the solution may leak from a channel of the microdevice

Methodology Applied
Scientific EffectAdsorption: Adsorption

Implementation Method 2

depressurizing an interior of the formed closed spaces

Methodology Applied
Scientific EffectAtmospheric pressure: Pressure Increase

Data Source

PatentUS20230046061A1Microdevice and manufacturing method for microdevice
Publication Date: 2023.02.16 TIANMA JAPAN LTD
  • US20230046061A1 patent drawing
  • US20230046061A1 patent drawing
  • US20230046061A1 patent drawing

AI summary

A microdevice includes a first substrate; and a second substrate that is joined to the first substrate, and that includes at least one groove that forms at least one microchannel with the first substrate and recesses that form closed spaces with the first substrate. When viewed from above, the closed spaces are disposed sandwiching the least one microchannel.