Microdiffraction X-ray Analysis Using Masked Strip Illumination

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Solution Overview

Problem

Conventional X-ray diffraction techniques face difficulties in measuring non-uniform samples efficiently, particularly due to low X-ray intensities and the need for precise sample positioning, which is time-consuming and challenging, especially at high resolutions.

Innovation Solution

A method using a mask and a two-dimensional X-ray detector to illuminate a strip on the sample, allowing simultaneous measurement of X-ray diffraction patterns along the strip without moving the sample, utilizing a source slit and alternate collimating optics to vary the strip length and resolution.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a pin-hole or dedicated X-ray optics is used to achieve a small spot for micro-diffraction, then spatial resolution is improved, but X-ray intensity deteriorates to very low levels

Engineering Contradiction:
Improvespatial resolutionVSAvoidX-ray intensity
Core Design Contradiction:
Measurement precisionVSIllumination intensity

Solution Approach 1:

The invention segments the measurement process by dividing the sample surface into multiple discrete spots that are measured sequentially. A small focused spot (achieved through pin-hole or dedicated optics) measures one location at a time, and the sample stage moves to position the next spot. This segmentation allows high spatial resolution at each measurement point while accumulating data from multiple points to build a complete map, resolving the contradiction between spot size and intensity by distributing the measurement across time and space rather than requiring all points to be illuminated simultaneously.

Inventive Principle:
Principle #1Segmentation

2Area of stationary object

If the sample is moved to image other regions for surface analysis, then measurement coverage is improved, but positioning accuracy and alignment difficulty worsen

Engineering Contradiction:
Improvemeasurement coverageVSAvoidpositioning accuracy
Core Design Contradiction:
Area of stationary objectVSMeasurement precision

Solution Approach 1:

The invention replaces the mechanical sample positioning system with an alternative approach where the X-ray beam is kept fixed and focused on a small spot, and the sample stage performs only simple translational movements to position different spots under the beam. The system uses a grid pattern of measurement spots with known coordinates, and data is collected by moving the sample to predetermined positions rather than requiring continuous complex alignment. This substitution of complex mechanical alignment with a simplified grid-based positioning system resolves the contradiction between coverage and positioning accuracy.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Measurement precision

If a small spot is used for micro-diffraction measurement, then spatial resolution is improved, but measurement time and operational difficulty worsen

Engineering Contradiction:
Improvespatial resolutionVSAvoidmeasurement speed
Core Design Contradiction:
Measurement precisionVSProductivity

Solution Approach 1:

The invention applies preliminary action by pre-defining a grid pattern of measurement spots across the sample surface before measurement begins. The coordinates and positions of all spots are predetermined and stored in the system. During measurement, the sample stage automatically moves to each pre-calculated position in sequence, eliminating the need for real-time alignment decisions or manual positioning adjustments. This preliminary planning of the measurement path resolves the contradiction between high spatial resolution and measurement speed by automating the positioning process based on pre-computed trajectories.

Inventive Principle:
Principle #10Preliminary action

4Measurement precision

If accurate sample alignment is required every time the sample is moved, then measurement precision is improved, but device complexity and operational complexity worsen

Engineering Contradiction:
Improvealignment accuracyVSAvoidpositioning system complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The invention applies universality by implementing a unified coordinate system and alignment procedure that works for all measurement spots across the entire sample surface. A single alignment calibration performed at the beginning establishes the relationship between the sample stage position and the X-ray beam geometry. This universal alignment framework allows the same focused spot and measurement geometry to be reproduced at every position in the grid without requiring re-alignment, resolving the contradiction between precision and complexity by making the alignment system universally applicable across all measurement locations.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables fast and efficient micro-diffraction analysis across the sample surface without requiring precise sample alignment or movement, optimizing spot resolution and intensity collection, and reducing experimental setup time and costs.

Implementation Method 1

an X-ray source 2 is used to generate an X-ray beam 4

Methodology Applied
Scientific EffectX-ray generation: X-Ray

Implementation Method 2

The X-rays incident on the illuminated strip 16 are diffracted by the sample 10 and form a diffracted beam 18

Methodology Applied
Scientific EffectX-ray diffraction: Diffraction

Data Source

PatentEP2634566B1Microdiffraction
Publication Date: 2019.03.27 PANALYTICAL BV
  • EP2634566B1 patent drawingFigure 1
  • EP2634566B1 patent drawingFigure 2
  • EP2634566B1 patent drawingFigure 3

AI summary

A method of X-ray diffraction illuminates a beam (4) of X-rays along an illuminated strip (16) on a surface (14) of a sample (10). The X-rays are diffracted by the sample (10) and pass through a mask (20) having a slit extending essentially perpendicularly to the strip (16). The X-rays are detected by a two-dimensional X-ray detector to measure the diffracted X-rays at different positions along the strip (16).