Microelectrode Film Manufacturing via Isotropic Etching

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Solution Overview

Problem

The existing manufacturing processes for microelectrode films are complex and do not easily allow for the production of microelectrodes with various shapes, which is necessary for effective contact with organisms of different shapes, affecting the accuracy of detection and stimulation results.

Innovation Solution

A method involving isotropic etching on a carrier substrate to form recesses, growing microelectrodes within these recesses, and transferring them onto a flexible substrate to achieve microelectrodes with arbitrary shapes, enhancing the effective contact area and reducing the risk of injury to organisms.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If conventional manufacturing processes are used, then the production process is simple, but the microelectrode shapes are limited and cannot be easily varied

Engineering Contradiction:

Improvemicroelectrode shape varietyVSAvoidmanufacturing process complexity

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The manufacturing process is divided into distinct modular steps: forming the carrier substrate with specific geometry, depositing the microelectrode material, allowing crystalline growth, separating from the carrier, and transferring to the final substrate. This segmentation enables independent optimization of each step and facilitates production of various microelectrode shapes through standardized processes.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The carrier substrate is pre-formed with the required geometric structure before microelectrode material deposition. This preliminary action defines the final microelectrode shape and allows for precise control of the microelectrode geometry without requiring complex post-processing steps.

Inventive Principle:

Principle #10Preliminary action

2Manufacturing precision

If microelectrode shape is customized for different organisms, then the effective contact area is improved, but the manufacturing complexity increases

Engineering Contradiction:

Improveeffective contact areaVSAvoidmanufacturing process complexity

Core Design Contradiction:

Manufacturing precisionVSDevice complexity

Solution Approach 1:

The microelectrode structure is designed with specific local geometries (such as hemispherical tips) that are optimized for contact with particular tissue types. The carrier substrate geometry is locally varied to match the required microelectrode shapes, while the overall manufacturing process remains standardized through the use of controlled crystalline growth from seed patterns.

Inventive Principle:

Principle #3Local quality

Solution Approach 2:

The microelectrode shape and size are controlled by changing physical and chemical parameters during the crystalline growth process, such as temperature, pressure, and material composition. This allows for precise control of the microelectrode effective contact area without requiring changes to the fundamental manufacturing process.

Inventive Principle:

Principle #35Parameter changes

3Measurement precision

If the microelectrode film is designed for high current density, then the detection and stimulation accuracy is improved, but the risk of injury to organisms increases

Engineering Contradiction:

Improvedetection accuracyVSAvoidrisk of injury

Core Design Contradiction:

Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The microelectrode tips are designed with curved, hemispherical geometries that distribute the current density more evenly across the contact surface. This curvature prevents localized current concentration that would cause tissue injury, while still maintaining the high current density necessary for accurate detection and stimulation through the enlarged effective contact area.

Inventive Principle:

Principle #14Spheroidality (Curvature)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method simplifies the production of microelectrodes with various shapes, improving the accuracy of biological detection and stimulation by increasing the effective contact area and reducing the risk of injury, while maintaining biocompatibility and electrochemical stability.

Implementation Method 1

forming at least one recess on a carrier substrate by isotropic etching

Methodology Applied

Scientific EffectIsotropic etching:

Implementation Method 2

growing a microelectrode in the recess by using the microelectrode seed pattern

Methodology Applied

Scientific EffectCrystalline growth:

Data Source

PatentUS12063749B2Method for manufacturing microelectrode film

Publication Date: 2024.08.13 BOE TECHNOLOGY GROUP CO LTD

AI summary

The present application provides a method for manufacturing a microelectrode film. The method includes: forming at least one recess on the carrier substrate by isotropic etching; forming a microelectrode seed pattern in the recess; growing a microelectrode in the recess by using the microelectrode seed pattern; making a first substrate to be in contact with a side of the carrier substrate having the recess thereon; separating the microelectrode from the carrier substrate to transfer the microelectrode onto the first substrate.