Microfabricated High-Pressure Fluid Cell With Thin-Membrane Beam Access
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Solution Overview
Problem
Existing high-energy photon beam cells, such as diamond anvil and Paris-Edinburgh cells, are costly and pose challenges in accessing the interior for imaging liquids at high pressures, limiting the flexibility in sample choice and environmental conditions.
Innovation Solution
A low-cost, microfabricated high-pressure cell with thin membranes and trenches for beam access, capable of withstanding pressures up to hundreds of bar, allowing larger analyte volumes and flexible sample conditions, utilizing micro-fabricated semiconductor substrates with aligned membranes and spacer layers for cavity formation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stress or pressure
If diamond anvil cells or Paris-Edinburgh cells are used to achieve high pressures, then the pressure resistance is improved, but the cost increases significantly and access to the interior for imaging becomes difficult
Solution Approach 1:
The device is divided into multiple semiconductor substrates (first substrate, second substrate) that are bonded together, with each substrate containing a portion of the cavity and membrane structure. This segmentation allows for easier fabrication using standard semiconductor processes while achieving the required pressure resistance through the combined structure.
Solution Approach 2:
The invention uses microfabricated semiconductor substrates that replicate the functional requirements of diamond anvil cells but with easier manufacturing. The semiconductor-based membranes and cavity structures copy the essential pressure-containing function while being produced through conventional semiconductor fabrication rather than expensive diamond machining.
2Stress or pressure
If diamond anvil cells or Paris-Edinburgh cells are used to achieve high pressures, then the pressure resistance is improved, but the access to interior for imaging becomes difficult
Solution Approach 1:
The device is divided into multiple semiconductor substrates (first substrate, second substrate) that are bonded together, with each substrate containing a portion of the cavity and membrane structure. This segmentation allows for easier fabrication using standard semiconductor processes while achieving the required pressure resistance through the combined structure.
Solution Approach 2:
The invention uses microfabricated semiconductor substrates that replicate the functional requirements of diamond anvil cells but with easier manufacturing. The semiconductor-based membranes and cavity structures copy the essential pressure-containing function while being produced through conventional semiconductor fabrication rather than expensive diamond machining.
3Ease of operation
If thin membranes are used to allow beam entry and exit, then the beam access is improved, but the structural soundness deteriorates at high pressures
Solution Approach 1:
The device uses thin semiconductor membranes (first membrane, second membrane) that are sufficiently thin to allow high-energy photon and electron beams to penetrate while maintaining structural integrity through the semiconductor material properties and the supported cavity geometry. The membranes are integrated with the semiconductor substrates to provide both transparency and strength.
4Strength
If the cavity size is reduced to improve membrane structural soundness, then the strength is improved, but the analyte volume decreases
Solution Approach 1:
The device uses thin semiconductor membranes (first membrane, second membrane) that are sufficiently thin to allow high-energy photon and electron beams to penetrate while maintaining structural integrity through the semiconductor material properties and the supported cavity geometry. The membranes are integrated with the semiconductor substrates to provide both transparency and strength.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Facilitates low-cost, high-pressure fluid analysis with larger analyte volumes and flexible conditions, bridging the pressure domain from atmospheric to GPa, while enabling efficient beam access and pressure sensing.
Implementation Method 1
capable of operating at high pressures of up to few hundred bar
Implementation Method 2
thin membranes with high transparency to the probe beam (e.g., e-beam or x-ray)
Data Source
AI summary
A low-cost high-pressure cell to facilitate effective analysis of sample materials with high energy photon and electron beams. In one example, the cell includes a first micro-fabricated semiconductor substrate having a first membrane of a micro-fabricated material formed thereon and including a first membrane-covered region, and a second micro-fabricated semiconductor substrate having a second membrane of the micro-fabricated material formed thereon and including a second membrane-covered region, the first and second micro-fabricated semiconductor substrates being bonded together such that the first and second membrane-covered regions are at least partially aligned. The first and second membrane-covered regions may be separated by at least one spacer layer such that a cavity is formed between the membranes, the cavity being bounded on at least one side by one of membranes. Access to the cavity may be provided by micro-fabricated trenches cut into at least one of the first and second micro-fabricated semiconductor substrates.