Oscillating Microfabrication for Continuous Transfer Mold Waveforms

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Solution Overview

Problem

The existing microfabrication techniques using cutting tools often result in defects such as broken oscillation waveforms on the surface of transfer objects, which impair their appearance and significantly decrease optical properties, especially when used for optical applications.

Innovation Solution

A microfabrication device and method that includes a cutting tool mounted on a tool mounting portion, a driving mechanism to move the tool relative to the substrate, and an oscillator to oscillate the cutting tool in specific phases, ensuring that oscillations at the start and end points of each cutting set are in phase and that oscillations between sets are also synchronized, thereby maintaining waveform continuity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Illumination intensity

If a cutting tool is oscillated during the cutting process, then the optical properties of the transfer object can be improved, but defects such as breaking of the oscillation waveform continuity may occur on the surface of the transfer object

Engineering Contradiction:
Improveoptical propertiesVSAvoidwaveform continuity
Core Design Contradiction:
Illumination intensityVSReliability

Solution Approach 1:

The control device monitors the oscillation state of the cutting tool and adjusts the oscillation parameters in real-time to maintain waveform continuity. By implementing feedback control, the system can detect and correct phase disruptions caused by multiple sets of cutting processes, ensuring that the oscillation waveform remains continuous across different cutting sets while preserving the optical properties of the transfer object

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The method pre-establishes phase relationship parameters for multiple sets of cutting processes before execution. By calculating and setting the appropriate phase offsets in advance for each cutting set, the system ensures that oscillation waveforms will be continuous when the cutting processes are executed sequentially, preventing waveform breaking while maintaining optical quality

Inventive Principle:
Principle #10Preliminary action

2Length of moving object

If multiple sets of cutting processes are performed, then the cutting depth can be increased, but phase discontinuity between sets may cause waveform breaking

Engineering Contradiction:
Improvecutting depthVSAvoidphase consistency
Core Design Contradiction:
Length of moving objectVSManufacturing precision

Solution Approach 1:

The oscillation parameters of the cutting tool are dynamically adjusted between different cutting sets. The system varies the oscillation phase and timing based on the specific requirements of each cutting set, allowing the cutting depth to be increased through multiple passes while maintaining phase continuity and waveform integrity across all sets

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach effectively suppresses defects in the oscillation waveform, ensuring continuous and phase-coherent oscillations across the surface, thereby enhancing the optical properties and appearance of the transfer object.

Implementation Method 1

an oscillator provided in the tool mounting portion, and configured to oscillate the cutting tool in at least one of a depth direction and a surface direction of the substrate

Methodology Applied
Scientific EffectOscillation: Vibration

Data Source

PatentUS11491672B2Microfabrication device, microfabrication method, transfer mold, and transfer object
Publication Date: 2022.11.08 DEXERIALS CORP
  • US11491672B2 patent drawing
  • US11491672B2 patent drawing
  • US11491672B2 patent drawing

AI summary

A new and improved microfabrication device, microfabrication method, transfer mold, and transfer object that can suppress a defect are provided. A microfabrication device comprises a tool mounting portion, a predetermined cutting tool, an oscillator, and a controller, wherein the controller performs a cutting process to satisfy at least one of: a cutting condition (1) that oscillations at a start point and an end point of each set are in phase with each other; and a cutting condition (2) that oscillations of the sets are in phase with each other.