Micro-fluid Measuring Apparatus Using Tuning Fork Vibration
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Solution Overview
Problem
Existing flow cytometry technologies face challenges with large optical measuring devices that are difficult to miniaturize and integrate into vacuum systems, and the MEMS process for micro-tube manufacturing is complex and costly.
Innovation Solution
A measuring apparatus comprising a micro-tube, a piezo-actuator, and a quartz tuning fork that converts vibration into an electrical signal, where the micro-tube is formed by melting and pulling a glass capillary tube using laser heating, allowing for reduced size and simpler manufacturing compared to conventional methods.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If an optical measuring device is used to measure micro-fluid, then measurement capability is achieved, but the device size becomes large and integration into vacuum systems becomes difficult
Solution Approach 1:
The patent replaces the optical measuring system with a mechanical vibration-based measurement system. A tuning fork serves as the sensing element that mechanically interacts with the micro-fluid in the capillary tube, converting physical/chemical properties into vibration frequency changes. This substitution eliminates the need for bulky optical components while maintaining measurement capability.
Solution Approach 2:
The invention changes the measurement parameter from optical properties (light reflection/transmission) to mechanical vibration frequency. The tuning fork's resonance frequency changes in response to the micro-fluid's physical and chemical characteristics, providing a compact alternative to optical measurement while preserving measurement precision.
2Manufacturing precision
If MEMS process is used to manufacture micro-tube, then micro-tube precision is achieved, but manufacturing complexity and cost increase
Solution Approach 1:
The patent extracts the micro-tube manufacturing process from the complex MEMS fabrication sequence. Instead of using full MEMS processes, the invention employs a simplified approach where a capillary tube is pulled and stretched to form the micro-tube structure, retaining only the essential precision-forming step while eliminating unnecessary complexity.
Solution Approach 2:
The manufacturing method changes from multi-step MEMS processes to a thermal-mechanical forming process. By applying localized heat and mechanical pulling forces to the capillary tube, the micro-tube achieves precise dimensions through controlled deformation rather than complex lithography and etching steps.
3Manufacturing precision
If MEMS process is used to manufacture micro-tube, then micro-tube precision is achieved, but manufacturing cost and time increase
Solution Approach 1:
The invention extracts and simplifies the manufacturing process by removing unnecessary MEMS steps. The capillary pulling method requires fewer process steps, shorter processing time, and lower material waste, directly improving productivity and reducing manufacturing cost while maintaining micro-tube precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables a compact, easily integratable measuring system with reduced manufacturing costs and improved yield, capable of measuring micro-fluid density and particle characteristics using real-time resonant frequency changes.
Implementation Method 1
an actuator vibrating the micro-tube
Implementation Method 2
a tuning fork converting vibration of the micro-tube into an electrical signal
Implementation Method 3
a glass capillary tube is melted by a laser heating
Data Source
AI summary
It is an object of the present invention to provide a measuring apparatus having a reduced size by a substitution of an optical measuring device. A measuring apparatus for measuring micro-fluid or floating particles therein according to an embodiment of the present invention includes: a micro-tube containing the micro-fluid; an actuator vibrating the micro-tube; and a tuning fork converting vibration of the micro-tube into an electrical signal.